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==AZ 5214E==
==AZ 5214E==
===Resolution===
===Resolution===
 
'''Resolution at optimal processing conditions for different exposure equipment:'''
{| class="wikitable"
{| class="wikitable"
|+
|+
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|}
|}
<br clear="all" />
<br clear="all" />
'''SEM images from different exposure equipment:'''


{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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|-style="background:silver; color:black"
|-style="background:silver; color:black"
!
!
!1µm triplets
!2µm triplets
!2µm triplets
!4µm triplets
!Lines
!Lines
!Trenches
!Trenches
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|Aligner: MA6-2
|Aligner: MA6-2
100mJ/cm<sup>2</sup>, vacuum contact
100mJ/cm<sup>2</sup>, vacuum contact
|
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|400px]]
|[[Image:W14 MA62 5214E vac D100_B4T_01.jpg|300px]]
|[[Image:W14 MA62 5214E vac D100_B4T_02.jpg|400px]]
|
|[[Image:W14 MA62 5214E vac D100_B4T_03.jpg|400px]]
|[[Image:W14 MA62 5214E vac D100_B4T_02.jpg|300px]]
|[[Image:W14 MA62 5214E vac D100_B4T_03.jpg|300px]]


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-1
|Aligner: MA6-1
100mJ/cm<sup>2</sup>, vacuum contact
100mJ/cm<sup>2</sup>, vacuum contact <br>(probably over-exposed)
(probably over-exposed)
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_02.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_04.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_05.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_03.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_04.jpg|290px]]
|[[Image:W32 PFL 5214 D100 vac C6B_05.jpg|290px]]


|-
|-
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|Aligner: Maskless 02 (MLA2)
|Aligner: Maskless 02 (MLA2)
90mJ/cm<sup>2</sup>, defoc 2
90mJ/cm<sup>2</sup>, defoc 2
|
|[[Image:W13 mla2 5214E D90 F2_05.jpg|400px]]
|[[Image:W13 mla2 5214E D90 F2_05.jpg|300px]]
|[[Image:W13 mla2 5214E D90 F2_01.jpg|400px]]
|
|[[Image:W13 mla2 5214E D90 F2_02.jpg|400px]]
|[[Image:W13 mla2 5214E D90 F2_01.jpg|300px]]
|[[Image:W13 mla2 5214E D90 F2_02.jpg|300px]]


|}
|}
<br clear="all" />
'''SEM images of different size structures:'''
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
!1µm triplets
!2µm triplets
!4µm triplets
|-


|-
|-style="background:WhiteSmoke; color:black"
|Aligner: MA6-1
100mJ/cm<sup>2</sup>, vacuum contact <br>(probably over-exposed)
|[[Image:W32 PFL 5214 D100 vac C6B_02.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_01.jpg|400px]]
|[[Image:W32 PFL 5214 D100 vac C6B_03.jpg|400px]]
|}
<br clear="all" />
<br clear="all" />


===Yield===
===Yield===
The yield is measured by inspecting all 116 lithographic resolution test structures in an optical microscope and recording the smallest resolved dots and lines.
The yield is measured by inspecting all 116 lithographic resolution test structures in an optical microscope and recording the smallest resolved dots and lines.
<br clear="all" />
<br clear="all" />
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<br clear="all" />
<br clear="all" />


===Resist profile (linewidth and sidewall angle)===
===Resist profile===
'''SEM images of 2µm triplets:'''
 
====Linewidth and sidewall angle vs exposure dose====
 
'''SEM images of 2µm triplets as a function of exposure dose:'''
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
|-
|-
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|}
|}
<br clear="all" />


{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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|}
|}
<br clear="all" />


'''Result of image analysis of SEM images of 2µm triplets:'''
'''Result of image analysis of SEM images of 2µm triplets:'''
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! width="510" |   
! width="510" |   


|+'''Width of 2µm line and sidewall angle vs. exposure dose for 1.5µm AZ 5214E.'''
|+
|- border="0" align="center"
|- border="0" align="center"
|[[Image:5214E_Linewidth vs dose.jpg|500px]]
|[[Image:5214E_Linewidth vs dose.jpg|500px]]
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|- align="center"
|- align="center"
| colspan="2" | Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).   
| colspan="2" | Width of 2µm line and sidewall angle vs. exposure dose for 1.5µm AZ 5214E. <br>Blue circles: Exposed on Aligner: MA6-2 in vacuum contact. <br>Orange Squares: Exposed on Aligner: Maskless 02 (MLA2) using defoc 2 (QC defoc=2).   
|}
|}
<br clear="all" />
<br clear="all" />


====Linewidth and sidewall angle vs defocus parameter====
'''SEM images as a function of defocus parameter for Aligner: Maskless 02 (MLA2) using dose 95mJ/cm<sup>2</sup>:'''
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
!Defoc -8
!Defoc -1
!Defoc 2
!Defoc 5
!Defoc 12
|-
|-
|-style="background:WhiteSmoke; color:black"
|2µm triplets
|[[Image:W33 MLA2 5214 F-8 D95_101.jpg|280px]]
|[[Image:W33 MLA2 5214 F-1 D95_01.jpg|280px]]
|[[Image:W33 MLA2 5214 F2 D95_01.jpg|280px]]
|[[Image:W33 MLA2 5214 F5 D95_01.jpg|280px]]
|[[Image:W33 MLA2 5214 F12 D95_101.jpg|280px]]
|-
|-style="background:WhiteSmoke; color:black"
|Lines
|[[Image:W33 MLA2 5214 F-8 D95_102.jpg|280px]]
|[[Image:W33 MLA2 5214 F-1 D95_02.jpg|280px]]
|[[Image:W33 MLA2 5214 F2 D95_1_02.jpg|280px]]
|[[Image:W33 MLA2 5214 F5 D95_02.jpg|280px]]
|[[Image:W33 MLA2 5214 F12 D95_102.jpg|280px]]
|}
<br clear="all" />
'''Result of image analysis of SEM images of 2µm triplets:'''
{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
{| cellpadding="2" style="border: 2px solid darkgray;" align="left"
! width="510" |  
! width="510" |  


|+'''Linewidth and sidewall angle vs. defocus value  for 1.5µm AZ 5214E exposed in Aligner: Maskless 02 (MLA2) using dose 95mJ/cm<sup>2</sup>.'''
|+
|- border="0" align="center"
|- border="0" align="center"
|[[Image:5214E_Profile vs defoc.jpg|500px]]
|[[Image:5214E_Profile vs defoc.jpg|500px]]


|- align="center"
|- align="center"
| Blue circles: Width of 2µm line. <br>Orange Squares: Sidewall angle.
| Linewidth and sidewall angle vs. defocus value  for 1.5µm AZ 5214E exposed in Aligner: Maskless 02 (MLA2) using dose 95mJ/cm<sup>2</sup>. <br>Blue circles: Width of 2µm line. <br>Orange Squares: Sidewall angle.
 
|}
|}
<br clear="all" />
<br clear="all" />


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