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Specific Process Knowledge/Lithography/Development/Developer TMAH UV-lithography processing: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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==Puddle Development==
==Puddle Development==
Development on Developer TMAH UV-lithography is divided into the following steps:  
Development on Developer TMAH UV-lithography is divided into the following steps:  
*Pre-wet (with developer)
*Pre-wet
*Puddle dispense
*Puddle dispense
*Development
*Development
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