Specific Process Knowledge/Lithography/Development: Difference between revisions
Appearance
No edit summary |
|||
| (One intermediate revision by the same user not shown) | |||
| Line 167: | Line 167: | ||
| 1 - 25 | | 1 - 25 | ||
|} | |} | ||
=Decommisioned tools= | =Decommisioned tools= | ||
<span style="color:red">Developer 1 & 2 were decommissioned 2017-01.</span> | <span style="color:red">Developer 1 & 2 were decommissioned 2017-01.</span> | ||
[[Specific Process Knowledge/Lithography/Development/1and2_developer|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Development/1and2_developer|Information about decommissioned tool can be found here.]] | ||
<span style="color:red">Developer 6 inch was decommissioned 2019-12.</span> | <span style="color:red">Developer 6 inch was decommissioned 2019-12.</span> | ||
[[Specific Process Knowledge/Lithography/Development/6inch_developer|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Development/6inch_developer|Information about decommissioned tool can be found here.]] | ||