Specific Process Knowledge/Lithography/Development: Difference between revisions
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=Development Comparison Table= | |||
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! [[Specific Process Knowledge/Lithography/Development | ! [[Specific Process Knowledge/Lithography/Development/beaker_developer|Manual beaker development]] | ||
! [[Specific_Process_Knowledge/Lithography/Development/SU8_developer|Developer: SU8 (Wet bench)]] | ! [[Specific_Process_Knowledge/Lithography/Development/SU8_developer|Developer: SU8 (Wet bench)]] | ||
! [[Specific_Process_Knowledge/Lithography/Development/manualEbeam_developer|Developer: E-beam 02]] | ! [[Specific_Process_Knowledge/Lithography/Development/manualEbeam_developer|Developer: E-beam 02]] | ||
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! [[Specific Process Knowledge/Lithography/Development/beaker_developer|Manual beaker development]] | |||
! [[Specific_Process_Knowledge/Lithography/Development#Developer: SU8 (Wet Bench)|Developer: SU8 (Wet bench)]] | |||
! [[Specific_Process_Knowledge/Lithography/Development#Developer: E-beam 02|Developer: E-beam 02]] | |||
! [[Specific_Process_Knowledge/Lithography/Development#Developer:_TMAH_Manual 02|Developer: TMAH Manual 02]] | |||
! [[Specific_Process_Knowledge/Lithography/Development#Developer_TMAH_UV-lithography|Developer: TMAH UV-lithography]] | |||
! [[Specific_Process_Knowledge/Lithography/Development/DUV_developer#Developer:_TMAH_Stepper|Developer: TMAH Stepper]] | |||
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=Decommisioned tools= | =Decommisioned tools= | ||
<span style="color:red">Developer 1 & 2 were decommissioned 2017-01.</span> | <span style="color:red">Developer 1 & 2 were decommissioned 2017-01.</span> | ||
[[Specific Process Knowledge/Lithography/Development/1and2_developer|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Development/1and2_developer|Information about decommissioned tool can be found here.]] | ||
<span style="color:red">Developer 6 inch was decommissioned 2019-12.</span> | <span style="color:red">Developer 6 inch was decommissioned 2019-12.</span> | ||
[[Specific Process Knowledge/Lithography/Development/6inch_developer|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Development/6inch_developer|Information about decommissioned tool can be found here.]] | ||