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Specific Process Knowledge/Thin film deposition/Deposition of Silicon: Difference between revisions

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|few nm to >200 nm  
|few nm to >200 nm  
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|few nm to ?
|few nm to 100 nm *
|few nm to 600 nm  
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| Please only deposit Si on the afternoon before a scheduled service as it can result in many flakes in the chamber. See the booking calendar or ask staff to find out when the next service will be.
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'''*''' If you wish to deposit a thicker layer than 100 nm please talk to responsible staff or write to thinfilm@nanolab.dtu.dk