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Line 49: Line 49:
!A-1
!A-1
|At III-V RIE
|At III-V RIE
|4525 55804
|452 55804
|-
|-


Line 56: Line 56:
!Ax2
!Ax2
|At the Lesker
|At the Lesker
|4525 55815
|452 55815
|-
|-


Line 63: Line 63:
!A-5
!A-5
|In the corner near the furnace/plasma asher
|In the corner near the furnace/plasma asher
|4525 55803
|452 55803
|-
|-
|-
|-
Line 69: Line 69:
!B-1
!B-1
|In the corridor, on the wall
|In the corridor, on the wall
|4525 55806
|452 55806
|-
|-


Line 76: Line 76:
!C-1
!C-1
|In the corridor, on the wall
|In the corridor, on the wall
|4525 55808
|452 55808
|-
|-


Line 83: Line 83:
!D-1
!D-1
|In the gowning area (entrance room)
|In the gowning area (entrance room)
|4525 55703
|452 55703
|-
|-


Line 90: Line 90:
!D-3
!D-3
|At the KOH
|At the KOH
|4525 55940
|452 55940
|-
|-


Line 97: Line 97:
!E-1
!E-1
|By the e-beam computers
|By the e-beam computers
|4525 55943
|452 55943
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!E-5/E-4
!E-4
|By the MLAs in E-5, by mask aligner in E-4
|By the mask aligner
|4525 55946
|452 55946
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!E-5
|Between the MLAs
|452 55945
|-
|-
|-style="background:WhiteSmoke; color:black"
!E-6
!E-6
|Furnace 6"
|Furnace 6"
|4525 55948
|452 55948
|-
|-
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!F-1
!F-1
|III-V growth
|III-V growth
|4525 55949
|452 55949
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!F-2
!F-2
|To the right of the XRD and Ellipsometer
|To the right of the XRD and Ellipsometer
|4525 55941
|452 55941
|-
|-
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!F-3
!F-3
|DUV Stepper
|DUV Stepper
|4525 55947
|452 55947
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!Basement 901
!Basement 901
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|4525 55812
|452 55812
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!Basement 904
!Basement 904
|To the right of the AFM
|To the right of the AFM
|4525 55813
|452 55813
|-
|-
|}
|}