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[[Category:346]]
= DTU Nanolab - Building 346/347 =
= DTU Nanolab - Building 346/347 =
[[Image:346 347.png|400px|right|thumb|link=|Building 346 (cleanroom), ''Photo: DTU Nanolab'']]
[[Image:346 347.png|400px|right|thumb|link=|Building 346 (cleanroom), ''Photo: DTU Nanolab'']]
Line 19: Line 20:
* First Floor: Offices, Lunch Room
* First Floor: Offices, Lunch Room
* Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab) <br><br>
* Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab) <br><br>
''Please note, due to reconstruction, upgrades, purchases, decommision of equipment  or for other reasons, equipment may be moved from the location specified below. Please have a look at [https://labmanager.dtu.dk/ www.labmanager.dk] under "Basic Info" and "Location" for an updated location.''
''Please note, due to reconstruction, upgrades, purchases, decommision of equipment  or for other reasons, equipment may be moved from the location specified below. Please have a look at [https://labmanager.dtu.dk/ www.labmanager.dk] under "Basic Info" and "Location" for an updated location.'' <br><br>
<br>
<br>
<br>
== Cleanroom (Ground Floor in B346) - Layout and Phones ==
== Cleanroom (Ground Floor in B346) - Layout and Phones ==


Line 51: Line 49:
!A-1
!A-1
|At III-V RIE
|At III-V RIE
|4525 55804
|452 55804
|-
|-


Line 58: Line 56:
!Ax2
!Ax2
|At the Lesker
|At the Lesker
|4525 55815
|452 55815
|-
|-


Line 65: Line 63:
!A-5
!A-5
|In the corner near the furnace/plasma asher
|In the corner near the furnace/plasma asher
|4525 55803
|452 55803
|-
|-
|-
|-
Line 71: Line 69:
!B-1
!B-1
|In the corridor, on the wall
|In the corridor, on the wall
|4525 55806
|452 55806
|-
|-


Line 78: Line 76:
!C-1
!C-1
|In the corridor, on the wall
|In the corridor, on the wall
|4525 55808
|452 55808
|-
|-


Line 85: Line 83:
!D-1
!D-1
|In the gowning area (entrance room)
|In the gowning area (entrance room)
|4525 55703
|452 55703
|-
|-


Line 92: Line 90:
!D-3
!D-3
|At the KOH
|At the KOH
|4525 55940
|452 55940
|-
|-


Line 99: Line 97:
!E-1
!E-1
|By the e-beam computers
|By the e-beam computers
|4525 55943
|452 55943
|-
|-


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!E-5/E-4
!E-4
|By the MLAs in E-5, by mask aligner in E-4
|By the mask aligner
|4525 55946
|452 55946
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!E-5
|Between the MLAs
|452 55945
|-
|-
|-style="background:WhiteSmoke; color:black"
!E-6
!E-6
|Furnace 6"
|Furnace 6"
|4525 55948
|452 55948
|-
|-
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!F-1
!F-1
|III-V growth
|III-V growth
|4525 55949
|452 55949
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!F-2
!F-2
|To the right of the XRD and Ellipsometer
|To the right of the XRD and Ellipsometer
|4525 55941
|452 55941
|-
|-
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!F-3
!F-3
|DUV Stepper
|DUV Stepper
|4525 55947
|452 55947
|-
|-


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!Basement 901
!Basement 901
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|4525 55812
|452 55812
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!Basement 904
!Basement 904
|To the right of the AFM
|To the right of the AFM
|4525 55813
|452 55813
|-
|-
|}
|}

Latest revision as of 09:24, 10 October 2025

DTU Nanolab - Building 346/347

Building 346 (cleanroom), Photo: DTU Nanolab

DTU Nanolab has several locations on the Lyngby campus, building 346/347 and 314/307.

Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo).

Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes (SEMs and TEMs), and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found here.

Building 346:

  • Ground Floor: Cleanroom
  • First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop)
  • Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1)


Building 347:

  • Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab
  • First Floor: Offices, Lunch Room
  • Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)

Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at www.labmanager.dk under "Basic Info" and "Location" for an updated location.

Cleanroom (Ground Floor in B346) - Layout and Phones

Drawing: DTU CAS Digital
Room number Location Phone number
A-1 At III-V RIE 452 55804
Ax2 At the Lesker 452 55815
A-5 In the corner near the furnace/plasma asher 452 55803
B-1 In the corridor, on the wall 452 55806
C-1 In the corridor, on the wall 452 55808
D-1 In the gowning area (entrance room) 452 55703
D-3 At the KOH 452 55940
E-1 By the e-beam computers 452 55943
E-4 By the mask aligner 452 55946
E-5 Between the MLAs 452 55945
E-6 Furnace 6" 452 55948
F-1 III-V growth 452 55949
F-2 To the right of the XRD and Ellipsometer 452 55941
F-3 DUV Stepper 452 55947
Basement 901 Hot Embosser, XRD RotAnode, Laser Micromachining Tool 452 55812
Basement 904 To the right of the AFM 452 55813


Basement Labs (Basement in B346) - Layout and Phones

Drawing: DTU CAS Digital




PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Phones

Drawing: DTU CAS Digital (modified on 21/05/2025)