Specific Process Knowledge/Lithography/LiftOff: Difference between revisions
| Line 135: | Line 135: | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*NMP (Remover 1165) | *NMP (Remover 1165) | ||
*Rinse in IPA | *Rinse in diluted IPA | ||
|- | |- | ||
!style="background:silver; color:black" valign="center" rowspan="2"|Process parameters | !style="background:silver; color:black" valign="center" rowspan="2"|Process parameters | ||