Specific Process Knowledge/Process Flow: Difference between revisions
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=The Process Flow= | =The Process Flow= | ||
A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities. | A Process Flow contains the sequence of steps and techniques used to create certain structures and devices at the microscopic and nanoscopic scales. This involves a combination of various fabrication methods and inspection techniques to achieve the desired features and functionalities. | ||
Starting a process flow from scratch with little or no previous knowledge can be challenging. Please do not hesitate to reach out to colleagues, other cleanroom users or our Fabrication Support team at [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk] for help with your process, discussions regarding problems or improvement. | Starting a process flow from scratch with little or no previous knowledge can be challenging. Please do not hesitate to reach out to colleagues, other cleanroom users or our Fabrication Support team at [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk] for help with your process, discussions regarding problems or improvement. | ||
Below are some recommendations on how to set up a process flow and more information on the different parts of a process flow, including an overview of various process steps. You can then find more detailed information about equipment, processes and materials available on the specific subpages. We also recommended to have a look at the process log on [https://labmanager.dtu.dk/ www.labmanager.dtu.dk] for the specific machine to check which process parameters or programs other users (f.ex. group members) are using. | |||
You might also have special requirements in your process flow. Please find below a short description of how to get approval for new chemicals or processes. | |||
If you are a new user to DTU Nanolab and you have issues on how to get started in our cleanroom, please have a look at following pages in labadviser: '''[[LabAdviser/Safety|"Safety"]]''' and '''[[Specific Process Knowledge/Getting Started|"Getting Started"]]'''. | If you are a new user to DTU Nanolab and you have issues on how to get started in our cleanroom, please have a look at following pages in labadviser: '''[[LabAdviser/Safety|"Safety"]]''' and '''[[Specific Process Knowledge/Getting Started|"Getting Started"]]'''. | ||
'''General Overview of a Process Flow''' | '''General Overview of a Process Flow''' | ||
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Before implementing new processes, we strongly recommended you to get your process validated by our Fabrication Support team. This is done to ensure safety to all cleanroom users and to guard involved machinery and equipment during the processing, e.g. avoid cross-contamination issues, as well as to support your work in the cleanroom. Process flows or any questions regarding process flow review can be submitted to [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk]. | Before implementing new processes, we strongly recommended you to get your process validated by our Fabrication Support team. This is done to ensure safety to all cleanroom users and to guard involved machinery and equipment during the processing, e.g. avoid cross-contamination issues, as well as to support your work in the cleanroom. Process flows or any questions regarding process flow review can be submitted to [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk]. | ||
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'''Process Flow Template''' | |||
You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br> | You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br> | ||
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Process flow template: [[Media:Process flow template v3.1.docx|Process_flow_template_v3.1.docx]] | |||
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Process flow example: [[LabAdviser/Process Flow/Solar cell process flow|Solar Cell Process flow]] | |||
<br>In the following | <br>In the following sections, you can find some guidelines and relevant information for creating your own process flow, such as relevant information about substrate, pattern design and mask fabrication, as well as process steps and characterization methods. | ||
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== Substrate == | == Substrate == | ||
Generally, there is a wide range of substrates available for cleanroom processing. This includes silicon, fused silica, III-V substrates, SOI wafers, but also rarer and more expensive materials such as silicon carbide, saphire, and diamond are possible. In some occasions, even different types of polymer can be processed at DTU Nanolab. | Generally, there is a wide range of substrates available for cleanroom processing. This includes silicon, fused silica, III-V substrates, SOI wafers, but also rarer and more expensive materials such as silicon carbide, saphire, and diamond are possible. In some occasions, even different types of polymer can be processed at DTU Nanolab. | ||
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| width="150" align="center" style="color:black"| Characterize your Sample[[image:JehanCharacterize.png|130px|frameless|link=Specific Process Knowledge/Characterization]] | | width="150" align="center" style="color:black"| Characterize your Sample[[image:JehanCharacterize.png|130px|frameless|link=Specific Process Knowledge/Characterization]] | ||
| width="150" align="center" style="color:black"| Cut & Pack your Sample (Backend) <br> <br> [[image:JehanPack.png|130px|frameless|link=Specific Process Knowledge/Back-end processing|Back-end processing, also called Assembly and Packaging, are typical processes used to finish up the wafer/chip fabrication, f.ex. wafer thinning, dicing into chips, bonding to a carrier and connecting it with wires to a printed circuit board (PCB).]] | | width="150" align="center" style="color:black"| Cut & Pack your Sample (Backend) <br> <br> [[image:JehanPack.png|130px|frameless|link=Specific Process Knowledge/Back-end processing|Back-end processing, also called Assembly and Packaging, are typical processes used to finish up the wafer/chip fabrication, f.ex. wafer thinning, dicing into chips, bonding to a carrier and connecting it with wires to a printed circuit board (PCB).]] | ||
| width="150" align="center" style="color:black"| Process Flow Examples [[image:Processflow b.png|130px|frameless|link= | | width="150" align="center" style="color:black"| Process Flow Examples [[image:Processflow b.png|130px|frameless|link=LabAdviser/Process Flow/Solar cell process flow|We have made the process flow for a simple solar cell available. It shows you how to build up a process flow for a component that can be made at DTU Nanolab.]] | ||
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== Characterization == | == Characterization == | ||
A crucial and often neglected part of each process flow is the characterization. After critical process steps you might need to analyze and measure the properties of produced structures, layers, materials or entire devices. Characterization techniques help you ensure that the fabricated components meet the required specifications and function correctly. There are many tools and methods available to inspect, analyze and measure the properties of features and materials such as physical, chemical, electrical, and mechanical properties. | A crucial and often neglected part of each process flow is the characterization. After critical process steps you might need to analyze and measure the properties of produced structures, layers, materials or entire devices. Characterization techniques help you ensure that the fabricated components meet the required specifications and function correctly. There are many tools and methods available to inspect, analyze and measure the properties of features and materials such as physical, chemical, electrical, and mechanical properties. | ||
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Below we will try to sum up some of the more typical characterization methods, but for now, please have a look at the [[Specific Process Knowledge/Characterization | '''Characterization''']] page. | |||
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=== Surface Toppography === | === Surface Toppography === | ||
''Analysis of form, shape, size, structure, and surface features including surface roughness, f.ex'' | ''Analysis of form, shape, size, structure, and surface features including surface roughness, f.ex'' | ||
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== Special Requirements == | == Special Requirements == | ||
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* others special requirements. | * others special requirements. | ||
In this section we try to elaborate on a few of these topics. Some might have been mentioned in the [[LabAdviser/Safety#"DTU Nanolab Introductory Course: Cleanroom in B346"|DTU Nanolab Introductory Course: Cleanroom in B346]]. If you still have questions, please contact | In this section we try to elaborate on a few of these topics. Some might have been mentioned in the [[LabAdviser/Safety#"DTU Nanolab Introductory Course: Cleanroom in B346"|DTU Nanolab Introductory Course: Cleanroom in B346]]. If you still have questions, please contact our [mailto:training@nanolab.dtu.dk Fabrication Support Team]. | ||
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=== Approval of Special Materials and Processes (Risk Assessment)=== | === Approval of Special Materials and Processes (Risk Assessment)=== | ||
If you require chemicals, substrates or would like to run a new process that are not already approved and/or available in the cleanroom, you need to fill out a Risk Assessment (in danish: "Risikovudering (RA)). In the RA, the intended work process with involved chemicals (including concentrations), safetry equipment and involved risk assessment must be described. The RA form is available in english and danish on [https://kemibrug.dk/APV '''Kemibrug''']. Please note that historically the risk assessment can be called "work place assessment" (or in danish arbejdspladsvudering (APV)). | If you require chemicals, substrates or would like to run a new process that are not already approved and/or available in the cleanroom, you need to fill out a Risk Assessment (in danish: "Risikovudering (RA)). In the RA, the intended work process with involved chemicals (including concentrations), safetry equipment and involved risk assessment must be described. The RA form is available in english and danish on [https://kemibrug.dk/APV '''Kemibrug''']. Please note that historically the risk assessment can be called "work place assessment" (or in danish arbejdspladsvudering (APV)). | ||
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The completed RA form and the safety data sheet (SDS) from the manufacturer or importer must be send to our [mailto:mbec@dtu.dk Safety Coordinator] for evaluation and approval of your process. | The completed RA form and the safety data sheet (SDS) from the manufacturer or importer must be send to our [mailto:mbec@dtu.dk Safety Coordinator] for evaluation and approval of your process. | ||
Non-Standard chemicals need to be purchased by users themselves. If you need assistance, please contact the [mailto:nanolabsupport@nanolab.dtu.dk Fabrication Support Team]. | Non-Standard chemicals need to be purchased by users themselves. If you need assistance, please contact the [mailto:nanolabsupport@nanolab.dtu.dk Fabrication Support Team]. | ||
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===Specialized Processes and Cross Contamination (Equipment)=== | ===Specialized Processes and Cross Contamination (Equipment)=== | ||