Latest revision as of 08:39, 31 July 2024

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Unless otherwise stated, this page is written by DTU Nanolab internal
All images and photos on this page belongs to DTU Nanolab

XRD SmartLab

The Rigaku SmartLab is an advanced XRD for measuring on thin films. All thin films can be measured without fixating the sample, as the system has a so called In-Plane arm.

The user manual(s), user APV(s), technical information, and contact information can be found in LabManager:

XRD SmartLab in LabManager - requires login

Various measurement types including X-Ray reflectivity, Rocking curve, Theta-2theta, and Pole figures are described here:

Process information

The measurement settings and results of the pre-acceptance test are described in this document, also found on the Lab Manager:

(FAT) Factory Acceptance Test - requires login

The same measurement were completed as part of the acceptance, but no report was generated. In addition the inspection certificate is available here:

(SAT) Site Acceptance Test - requires login

Software for analysis

Please see the Data Analysis section at the main XRD page.

Characterization of thin films using X-ray reflectivity (XRR)

Implementing the XRR method the user can calculate thickness, density, and roughness of the deposited material. The XRR is also widely employed for multilayer stack analysis.

Here are some results available:

Characterization of e-beam deposited Al thin films.

Characterization of DC sputtered Al thin films.

Characterization of ALD deposited Al₂O₃ and TiO₂ ultrathin layers.

Characterization of Sputtered deposited CrSi bilayer.

Characterization of Sputtered deposited MgO thin films.

Characterization of Sputtered deposited Sc thin films.

Characterization of Sputtered deposited ScN thin films.

Grazing Incidence X-ray Diffraction XRD (GiXRD)

Evaluation of Instrumental broading in GiXRD.

θ/2θ X-ray Diffraction

Evaluation of Instrumental broadening in symmetrical θ/2θ measurements.

Equipment performance and process related parameters

Equipment		XRD SmartLab
Purpose	Crystal structure analysis and thin film thickness measurement	Phase ID Crystal Size Crystallinity Quality and degree of orientation 3D orientation Latice strain Composition Twist 3D lattice constant Thickness Roughness Density
X-ray generator	Maximum rated output	3 kW
	Rated tube voltage	20 to 45 kV
	Rated tube current	2 to 60 mA
	Type	Sealed tube
	Target	Cu
	Focus size	0.4 mm x 8 mm (Line/Point)
Goniometer	Scanning mode	incident / receiver coupled or independent
	Goniomenter radius	300 mm
	Minimum step size	0.0001° (0.36")
	Sample stage	χ:-5~+95° φ:0~360° Z:-4~+1 mm X,Y:±50 mm for a 100 mm wafer Rx,Ry:-5~+5°
Optics	Incident side	Cross Beam Optics(CBO) Ge(220)x2 monochromator In-Plane Parallel Slit Collimator (PSC) Soller slit Variable divergence slit
Optics	Receiver side	Automatic variable scattering slit Automatic variable receiver slit Parallel slit analysers (PSA) Ge(220)x2 analyser
Substrates	Substrate size	up to 150 mm wafers; thickness up to 21 mm
	Allowed materials	All materials allowed in the cleanroom

@@ Line 1: / Line 1: @@
+'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/XRD/XRD_SmartLab click here]'''
-== XRD SmartLab ==
+<i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b><br>
+All images and photos on this page belongs to <b>DTU Nanolab</b></i>
+= XRD SmartLab =
 The Rigaku SmartLab is an advanced XRD for measuring on thin films. All thin films can be measured without fixating the sample, as the system has a so called In-Plane arm.
-[[image:XRD_SmartLab.jpg|200x200px|right|thumb|The XRD SmartLab located in cleanroom F-2]]
+[[image:XRD_SmartLab.jpg|400x400px|right|thumb|The XRD SmartLab located in cleanroom F-2]]
 '''The user manual(s), user APV(s), technical information, and contact information can be found in LabManager:'''
-[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=428 XRD SmartLab in LabManager]
+[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=428 XRD SmartLab in LabManager]  - requires login
+Various measurement types including X-Ray reflectivity, Rocking curve, Theta-2theta, and Pole figures are described here:
 [http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XRD/Process_Info  Process information]
+The measurement settings and results of the pre-acceptance test are described in this document, also found on the Lab Manager:
+*[https://labmanager.dtu.dk/view_binary.php?fileId=5413| (FAT) Factory Acceptance Test]  - requires login
+The same measurement were completed as part of the acceptance, but no report was generated. In addition the inspection certificate is available here:
+*[https://labmanager.dtu.dk/view_binary.php?fileId=5414| (SAT) Site Acceptance Test]  - requires login
 ==Software for analysis==
-The software packages used for data analysis are available on the equipment computer, but we recommend that you install it on your personal computer. To run the software you need a USB dongle with a license on, these can be borrowed from Rebecca and Kristian in room 347-077. We only have 9 dongles available, so when you are done please return the dongle to Nanolab.
+Please see the Data Analysis section at the main [[Specific Process Knowledge/Characterization/XRD|XRD page]].
+==Characterization of thin films using X-ray reflectivity (XRR)==
+Implementing the XRR method the user can calculate thickness, density, and roughness of the deposited material. The XRR is also widely employed for multilayer stack analysis.
+Here are some results available:
+* Characterization of [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Aluminium/Al_Ebeam_evaporation_in_Temescal|e-beam deposited Al thin films]].
+* Characterization of [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Aluminium/Al_Sputtering_in_Cluster_Lesker_PC3#X-ray_reflectivity_analysis|DC sputtered Al thin films]].
+* Characterization of [[Specific_Process_Knowledge/Characterization/XRD/XRD_SmartLab/ALD_deposited_alumina_and_titania_XRR#X-ray_reflectivity_results|ALD deposited Al<sub>2</sub>O<sub>3</sub> and TiO<sub>2</sub> ultrathin layers]].
-The software can be found on "CleanroomDrive\_Equipment\XRD\Rigaku software\RILauncher", it should be possible to install the software without a dongle. To use the software you have to log in. The user is: Administrator. There is no password.
+* Characterization of [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_CrSi#X-ray_Reflectivity_Analysis|Sputtered deposited CrSi bilayer]].
+* Characterization of [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_MgO#X-Ray_Reflectivity|Sputtered deposited MgO thin films]].
+* Characterization of [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Scandium/Sc_Sputtering_in_Cluster_Lesker_PC3#X-ray_Reflectivity_(XRR)|Sputtered deposited Sc thin films]].
+* Characterization of [[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Scandium_Nitride/ScN_Reactive_Sputtering_in_Cluster_Lesker_PC3#X-ray_Reflectivity_(XRR)|Sputtered deposited ScN thin films]].
+<!-- * Characterization of [[Specific_Process_Knowledge/Characterization/XRD/XRD_SmartLab/ALD_deposited_alumina_and_titania_XRR_and_SE_comparison|ALD deposited Al<sub>2</sub>O<sub>3</sub> and TiO<sub>2</sub> ultrathin layers]].-->
+==Grazing Incidence X-ray Diffraction XRD (GiXRD)==
+* Evaluation of [[Specific Process Knowledge/Characterization/XRD/XRD SmartLab/Instrumental broading in GiXRD|Instrumental broading in GiXRD]].
+==θ/2θ X-ray Diffraction==
+* Evaluation of [[Specific Process Knowledge/Characterization/XRD/XRD SmartLab/Instrumental broading in T2T|Instrumental broadening in symmetrical θ/2θ measurements]].
 ==Equipment performance and process related parameters==
@@ Line 25: / Line 72: @@
 !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
 |style="background:WhiteSmoke; color:black"|<b>XRD SmartLab</b>
-|style="background:WhiteSmoke; color:black"|<b>XRD Powder</b>
 |-
 !style="background:silver; color:black;" align="center" width="60"|Purpose
@@ Line 42: / Line 88: @@
 *Roughness
 *Density
-|style="background:WhiteSmoke; color:black"|
-*Phase ID
-*Crystal Size
-*Crystallinity
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="6"|X-ray generator
@@ Line 52: / Line 95: @@
 |style="background:WhiteSmoke; color:black"|
 kW
-|style="background:WhiteSmoke; color:black"|
-W
 |-
 |style="background:LightGrey; color:black"|
@@ Line 59: / Line 100: @@
 |style="background:WhiteSmoke; color:black"|
 to 45 kV
-|style="background:WhiteSmoke; color:black"|
-kV
 |-
 |style="background:LightGrey; color:black"|
@@ Line 66: / Line 105: @@
 |style="background:WhiteSmoke; color:black"|
 to 60 mA
-|style="background:WhiteSmoke; color:black"|
-mA
 |-
 |style="background:LightGrey; color:black"|
 Type
-|style="background:WhiteSmoke; color:black"|
-Sealed tube
 |style="background:WhiteSmoke; color:black"|
 Sealed tube
@@ Line 78: / Line 113: @@
 |style="background:LightGrey; color:black"|
 Target
-|style="background:WhiteSmoke; color:black"|
-Cu
 |style="background:WhiteSmoke; color:black"|
 Cu
@@ Line 87: / Line 120: @@
 |style="background:WhiteSmoke; color:black"|
 .4 mm x 8 mm (Line/Point)
-|style="background:WhiteSmoke; color:black"|
-.4 mm x 12 mm (Line)
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Goniometer
+!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Goniometer
 |style="background:LightGrey; color:black"|
 Scanning mode
 |style="background:WhiteSmoke; color:black"|
 incident / receiver coupled or independent
-|style="background:WhiteSmoke; color:black"|
-incident / receiver coupled
 |-
 |style="background:LightGrey; color:black"|
@@ Line 102: / Line 131: @@
 |style="background:WhiteSmoke; color:black"|
 mm
-|style="background:WhiteSmoke; color:black"|
-mm
 |-
 |style="background:LightGrey; color:black"|
@@ Line 109: / Line 136: @@
 |style="background:WhiteSmoke; color:black"|
 .0001° (0.36")
-|style="background:WhiteSmoke; color:black"|
-.001° (3.6")
 |-
 |style="background:LightGrey; color:black"|
@@ Line 120: / Line 145: @@
 *X,Y:&plusmn;50 mm for a 100 mm wafer
 *Rx,Ry:-5~+5°
-|style="background:WhiteSmoke; color:black"|
-Fixed with rotation
-|-
-|style="background:LightGrey; color:black"|
-Sample size
-|style="background:WhiteSmoke; color:black"|
-Diameter: 150 mm
-Thickness: 0~21 mm
-|style="background:WhiteSmoke; color:black"|
-Powders
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Optics
 |style="background:LightGrey; color:black"|Incident side
@@ Line 139: / Line 155: @@
 *Soller slit
 *Variable divergence slit
-|style="background:WhiteSmoke; color:black"|
-*0.04° soller slit
-*Ni and Cu filter
-*Divergence slits
-*Beam mask
 |-
 |style="background:LightGrey; color:black"|Receiver side
@@ Line 151: / Line 162: @@
 *Parallel slit analysers (PSA)
 *Ge(220)x2 analyser
-|style="background:WhiteSmoke; color:black"|
-*0.04° soller slit
-*Ni filter
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
 |style="background:LightGrey; color:black"|Substrate size
 |style="background:WhiteSmoke; color:black"|
-up to 150 mm wafers
+up to 150 mm wafers; thickness up to 21 mm
-|style="background:WhiteSmoke; color:black"|
-Only for powders
 |-
 | style="background:LightGrey; color:black"|Allowed materials
 |style="background:WhiteSmoke; color:black"|
-All materials
+All materials allowed in the cleanroom
-|style="background:WhiteSmoke; color:black"|
-All materials have to be approved
 |-
 |}
 <br clear="all" />