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Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon: Difference between revisions

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[[Category: Furnaces|LPCVD Poly]]
[[Category: Furnaces|LPCVD Poly]]
[[Category: Thin Film Deposition|LPCVD Poly]]
[[Category: Thin Film Deposition|LPCVD Poly]]


==Deposition of Silicon using LPCVD==
==Deposition of Silicon using LPCVD==
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==Process information==
==Process information==


*[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_4%22_polysilicon_furnace|Deposition of polysilicon using the 4" polysilicon furnace]]
*[[/Standard recipes, QC limits and results for the 4" polysilicon furnace|Deposition of polysilicon using the B4 4" polysilicon furnace]]
*[[/Boron doped poly-Si and a-Si |Boron doped poly-Si and a-Si by using 4" polysilicon furnace]]
*[[/Boron doped poly-Si and a-Si |Boron doped poly-Si and a-Si by using the B4 4" polysilicon furnace]]
 
*[[/Phosphorous doped poly-Si|Phosphorous doped poly-Si using the B4 4" polysilicon furnace]]


*[[Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_polysilicon/Deposition_of_polysilicon_using_LPCVD/Standard_recipes,_QC_limits_and_results_for_the_6%22_polysilicon_furnace|Deposition of polysilicon using the 6" polysilicon furnace]]
*[[/Boron doped poly-Si |Boron doped poly-Si using 6" polysilicon furnace]]


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*[[/Standard recipes, QC limits and results for the 6" polysilicon furnace|Deposition of polysilicon using the E2 6" polysilicon furnace]]
*[[Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD|Deposition of polysilicon using LPCVD]]
*[[/Boron doped poly-Si |Boron doped poly-Si using the E2 6" polysilicon furnace]]
hide text -->


==Overview of the performance of the LPCVD polysilicon processes and some process related parameters==
==Overview of the performance of the LPCVD polysilicon processes and some process related parameters==
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