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LabAdviser/346: Difference between revisions

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Line 102: Line 102:
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!E-5/E-4
!E-4
|By the MLAs in E-5, by mask aligner in E-4
|By the mask aligner
|452 55946
|452 55946
|-
|-
Line 109: Line 109:
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!E-5
|Between the MLAs
|452 55945
|-
|-
|-style="background:WhiteSmoke; color:black"
!E-6
!E-6
|Furnace 6"
|Furnace 6"
Line 114: Line 121:
|-
|-
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!F-1
!F-1
|III-V growth
|III-V growth
Line 121: Line 128:


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!F-2
!F-2
|To the right of the XRD and Ellipsometer
|To the right of the XRD and Ellipsometer
Line 127: Line 134:
|-
|-
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!F-3
!F-3
|DUV Stepper
|DUV Stepper
Line 134: Line 141:


|-
|-
|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!Basement 901
!Basement 901
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|452 55812
|452 55812
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!Basement 904
!Basement 904
|To the right of the AFM
|To the right of the AFM