LabAdviser/346: Difference between revisions
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[[Category:346]] | |||
= DTU Nanolab - Building 346/347 = | = DTU Nanolab - Building 346/347 = | ||
[[Image:346 347.png|400px|right|thumb|link=|Building 346 (cleanroom), ''Photo: DTU Nanolab'']] | [[Image:346 347.png|400px|right|thumb|link=|Building 346 (cleanroom), ''Photo: DTU Nanolab'']] | ||
| Line 15: | Line 11: | ||
'''Building 346:''' | '''Building 346:''' | ||
* Ground: Cleanroom | * Ground Floor: Cleanroom | ||
* First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop) | * First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop) | ||
* Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1) | * Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1) | ||
| Line 22: | Line 18: | ||
* Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab | * Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab | ||
* First Floor: Offices, | * First Floor: Offices, Lunch Room | ||
* Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab) | * Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab) <br><br> | ||
<br> | ''Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at [https://labmanager.dtu.dk/ www.labmanager.dk] under "Basic Info" and "Location" for an updated location.'' <br><br> | ||
<br> | |||
''Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at [https://labmanager.dtu.dk/ www.labmanager.dk] under "Basic Info" and "Location" for an updated location.'' | |||
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== Cleanroom (Ground Floor in B346) - Layout and Phones == | == Cleanroom (Ground Floor in B346) - Layout and Phones == | ||
| Line 58: | Line 49: | ||
!A-1 | !A-1 | ||
|At III-V RIE | |At III-V RIE | ||
| | |452 55804 | ||
|- | |- | ||
| Line 65: | Line 56: | ||
!Ax2 | !Ax2 | ||
|At the Lesker | |At the Lesker | ||
| | |452 55815 | ||
|- | |- | ||
| Line 72: | Line 63: | ||
!A-5 | !A-5 | ||
|In the corner near the furnace/plasma asher | |In the corner near the furnace/plasma asher | ||
| | |452 55803 | ||
|- | |- | ||
|- | |- | ||
| Line 78: | Line 69: | ||
!B-1 | !B-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
| | |452 55806 | ||
|- | |- | ||
| Line 85: | Line 76: | ||
!C-1 | !C-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
| | |452 55808 | ||
|- | |- | ||
| Line 92: | Line 83: | ||
!D-1 | !D-1 | ||
|In the gowning area (entrance room) | |In the gowning area (entrance room) | ||
| | |452 55703 | ||
|- | |- | ||
| Line 99: | Line 90: | ||
!D-3 | !D-3 | ||
|At the KOH | |At the KOH | ||
| | |452 55940 | ||
|- | |- | ||
| Line 106: | Line 97: | ||
!E-1 | !E-1 | ||
|By the e-beam computers | |By the e-beam computers | ||
| | |452 55943 | ||
|- | |- | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
! | !E-4 | ||
|By the | |By the mask aligner | ||
| | |452 55946 | ||
|- | |- | ||
|- | |- | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!E-5 | |||
|Between the MLAs | |||
|452 55945 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!E-6 | !E-6 | ||
|Furnace 6" | |Furnace 6" | ||
| | |452 55948 | ||
|- | |- | ||
|- | |- | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
!F-1 | !F-1 | ||
|III-V growth | |III-V growth | ||
| | |452 55949 | ||
|- | |- | ||
|- | |- | ||
|-style="background: | |-style="background:WhiteSmoke; color:black" | ||
!F-2 | !F-2 | ||
|To the right of the XRD and Ellipsometer | |To the right of the XRD and Ellipsometer | ||
| | |452 55941 | ||
|- | |- | ||
|- | |- | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
!F-3 | !F-3 | ||
|DUV Stepper | |DUV Stepper | ||
| | |452 55947 | ||
|- | |- | ||
|- | |- | ||
|-style="background: | |-style="background:WhiteSmoke; color:black" | ||
!Basement 901 | !Basement 901 | ||
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool | |Hot Embosser, XRD RotAnode, Laser Micromachining Tool | ||
| | |452 55812 | ||
|- | |- | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
!Basement 904 | !Basement 904 | ||
|To the right of the AFM | |To the right of the AFM | ||
| | |452 55813 | ||
|- | |- | ||
|} | |} | ||