LabAdviser/346: Difference between revisions
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= DTU Nanolab - Building 346/347 = | = DTU Nanolab - Building 346/347 = | ||
[[Image:346 347.png|400px|right|thumb|link=|Building 346 (cleanroom), ''Photo: DTU Nanolab'']] | |||
'''DTU Nanolab has several locations on the Lyngby campus, building 346/347 and 314/307.''' | '''DTU Nanolab has several locations on the Lyngby campus, building 346/347 and 314/307.''' | ||
Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo). | Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo). | ||
Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes, and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found [[LabAdviser/314|<b>here</b>]]. | Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes (SEMs and TEMs), and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found [[LabAdviser/314|<b>here</b>]]. | ||
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'''Building 346:''' | '''Building 346:''' | ||
* Ground: Cleanroom | * Ground Floor: Cleanroom | ||
* First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop) | * First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop) | ||
* Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1) | * Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1) | ||
| Line 25: | Line 18: | ||
* Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab | * Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab | ||
* First Floor: Offices, | * First Floor: Offices, Lunch Room | ||
* Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab) | * Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab) <br><br> | ||
<br> | ''Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at [https://labmanager.dtu.dk/ www.labmanager.dk] under "Basic Info" and "Location" for an updated location.'' <br><br> | ||
<br> | == Cleanroom (Ground Floor in B346) - Layout and Phones == | ||
''Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at | |||
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== Cleanroom (Ground Floor in B346) - Layout and | |||
{| style="color: black;" width="100%" | {| style="color: black;" width="100%" | ||
| colspan="2" | | | colspan="2" | | ||
|- | |- | ||
| | |||
{| style="color: black;" width="100%" | {| style="color: black;" width="100%" | ||
| colspan="2" | | | colspan="2" | | ||
|- | |- | ||
| | |||
[[image:Cleanroom_naming_2017.jpg|500px|thumb|link=|Drawing: DTU CAS Digital]] | [[image:Cleanroom_naming_2017.jpg|500px|thumb|link=|Drawing: DTU CAS Digital]] | ||
|} | |} | ||
| | |||
{|border="1" cellspacing="1" cellpadding="1" style="text-align:left;" | {|border="1" cellspacing="1" cellpadding="1" style="text-align:left;" | ||
| Line 61: | Line 49: | ||
!A-1 | !A-1 | ||
|At III-V RIE | |At III-V RIE | ||
| | |452 55804 | ||
|- | |- | ||
| Line 68: | Line 56: | ||
!Ax2 | !Ax2 | ||
|At the Lesker | |At the Lesker | ||
| | |452 55815 | ||
|- | |- | ||
| Line 75: | Line 63: | ||
!A-5 | !A-5 | ||
|In the corner near the furnace/plasma asher | |In the corner near the furnace/plasma asher | ||
| | |452 55803 | ||
|- | |- | ||
|- | |- | ||
| Line 81: | Line 69: | ||
!B-1 | !B-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
| | |452 55806 | ||
|- | |- | ||
| Line 88: | Line 76: | ||
!C-1 | !C-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
| | |452 55808 | ||
|- | |- | ||
| Line 95: | Line 83: | ||
!D-1 | !D-1 | ||
|In the gowning area (entrance room) | |In the gowning area (entrance room) | ||
| | |452 55703 | ||
|- | |- | ||
| Line 102: | Line 90: | ||
!D-3 | !D-3 | ||
|At the KOH | |At the KOH | ||
| | |452 55940 | ||
|- | |- | ||
| Line 109: | Line 97: | ||
!E-1 | !E-1 | ||
|By the e-beam computers | |By the e-beam computers | ||
| | |452 55943 | ||
|- | |- | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
! | !E-4 | ||
|By the | |By the mask aligner | ||
| | |452 55946 | ||
|- | |- | ||
|- | |- | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!E-5 | |||
|Between the MLAs | |||
|452 55945 | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!E-6 | !E-6 | ||
|Furnace 6" | |Furnace 6" | ||
| | |452 55948 | ||
|- | |- | ||
|- | |- | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
!F-1 | !F-1 | ||
|III-V growth | |III-V growth | ||
| | |452 55949 | ||
|- | |- | ||
|- | |- | ||
|-style="background: | |-style="background:WhiteSmoke; color:black" | ||
!F-2 | !F-2 | ||
|To the right of the XRD and Ellipsometer | |To the right of the XRD and Ellipsometer | ||
| | |452 55941 | ||
|- | |- | ||
|- | |- | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
!F-3 | !F-3 | ||
|DUV Stepper | |DUV Stepper | ||
| | |452 55947 | ||
|- | |- | ||
|- | |- | ||
|-style="background: | |-style="background:WhiteSmoke; color:black" | ||
!Basement 901 | !Basement 901 | ||
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool | |Hot Embosser, XRD RotAnode, Laser Micromachining Tool | ||
| | |452 55812 | ||
|- | |- | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
!Basement 904 | !Basement 904 | ||
|To the right of the AFM | |To the right of the AFM | ||
| | |452 55813 | ||
|- | |- | ||
|} | |} | ||
| Line 160: | Line 155: | ||
<br clear="all"/> | <br clear="all"/> | ||
== Basement Labs (Basement in B346) - Layout and | == Basement Labs (Basement in B346) - Layout and Phones == | ||
[[file:Basement 346 phase 1.jpg|left| | [[file:Basement 346 phase 1.jpg|left|800px|thumb|link=|Drawing: DTU CAS Digital]] | ||
<br clear="all"/> | <br clear="all"/> | ||
<br> | <br> | ||
<br> | <br> | ||
== PolyFabLab and SupportLab (Ground Floor in B347) - Layout and | == PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Phones == | ||
[[file:Floor Plan 347 ground.png|left| | [[file:Floor Plan 347 ground.png|left|800px|thumb|link=|Drawing: DTU CAS Digital ''(modified on 21/05/2025)'']] | ||
<br clear="all"/> | <br clear="all"/> | ||