Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
m →An overview of the performance of the AFM Icon: then -> than |
|||
| Line 115: | Line 115: | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|[[#Height Accuracy|Height (z) accuracy]] | |style="background:LightGrey; color:black"|[[#Height Accuracy|Height (z) accuracy]] | ||
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better | |style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better than 0.75% | ||
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better | |style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better than 0.75% | ||
|- | |- | ||
|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||