Specific Process Knowledge/Characterization/XPS/ISS/Notes
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Notes on ISS
This page only has temporary notes
Calibration by Nanolab staff only
Open the ion gun dialog and select the 'Filament' tab as shown below. In the 'Auto Setup' frame select 'ISS mode' and press 'Run' as indicated by a green square below left. When this procedure completes, press 'Calculate' in the 'Ion Source Energy' frame - highlighted by a red square.