Specific Process Knowledge/Characterization/XPS/ISS

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Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab

Ion Scattering Spectroscopy on XPS Nexsa

This page is intended to have a lot of material on the applications of ISS. So far, however, we have only very limited experience in using this. Therefore, until we have something to present here you are referred to the comparison page. There, you will find a table with articles and application notes on all the options available on the XPS Nexsa. Please note that Ion Scattering Spectroscopy is also referred to as LEIS.

• Notes on ISS