Deletion log

Below is a list of the most recent deletions.

09:14, 3 December 2024 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Espacer (Thomas P asked me to delete it)
08:01, 2 September 2024 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/DiamondCVD (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/DiamondCVD click here]''' Unless otherwise stated, this page is written by DTU Nanolab internal == SEKI Diamond CVD - this machine is being decommissioned (2024) ==")
08:01, 2 September 2024 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/DiamondCVD/Diamond CVD process details (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/DiamondCVD/Diamond_CVD_process_details click here]''' ''All contents by DTU Nanolab staff unless otherwise noted.'' =Diamond growth is no longer possible at Nanolab=", and the only contributor was "Reet" (talk))
08:57, 3 January 2024 Bghe talk contribs deleted page File:E-beam Lithography Lecture Tine Greibe 2015 (4).pdf (Thomas Anhøj says so)
08:56, 3 January 2024 Bghe talk contribs deleted page File:9500FS maintenace check list.pdf (Thomas Anhøj says so)
08:56, 3 January 2024 Bghe talk contribs deleted page File:Height sensor.pdf (Thomas)
12:39, 2 January 2024 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithographyForNerds (OK fra Thomas Pedersen)
11:12, 2 January 2024 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/JEOL JBX-9500FSZ
11:11, 2 January 2024 Bghe talk contribs deleted page File:Lecture E-beam Lithography -LGPE.pdf (Thomas Anhøj says so)
11:49, 20 December 2023 Bghe talk contribs deleted page File:Stormode 2016.pdf
11:39, 20 December 2023 Bghe talk contribs deleted page File:Rie1 040810 02 ohpolya10.jpg
11:36, 20 December 2023 Bghe talk contribs deleted page File:SPTS ICP Metal Etcher.pdf
11:32, 20 December 2023 Bghe talk contribs deleted page File:141216 Kundestormode 2014 final right prices.pdf
14:14, 7 August 2023 Bghe talk contribs deleted page Specific Process Knowledge/Thin Film deposition/ALD/TiO2 deposition using ALD/TiO2 deposition on trenches using ALD (content was: "Delete this page :)")
13:23, 23 May 2023 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Black Magic PECVD/MWNT (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Black_Magic_PECVD/MWNT click here]''' =''' <big> This page is obsolete - the instrument has been moved to the physics department </big> '''= ''' <big> This page is not being updated at the moment </b...")
13:20, 23 May 2023 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Black Magic PECVD/Black Magic details (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Black_Magic_PECVD/Black_Magic_details click here]''' =''' <big> This page is obsolete - the instrument has been moved to the physics department </big> '''= ''' <big> This page is not being updated at the mo...")
13:20, 23 May 2023 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Black Magic PECVD/Graphene (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Black_Magic_PECVD/Graphene. click here]''' =''' <big> This page is obsolete - the instrument has been moved to the physics department </big> '''= ''' <big> This page is not being updated at the moment...")
13:19, 23 May 2023 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Black Magic PECVD (content before blanking was: "'''Feedback to this page''': '''[mailto:danchip-processengineering@danchip.dtu.dk?Subject=Feed%20back%20from%20page%http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Black_Magic_PECVD click here]''' =''' <big> This page is obsolete - the instrument has been moved to the physics department </big> '''= Thin film Black Category: Thin Film Deposition|Black...")
14:50, 27 March 2023 Jehan talk contribs deleted page File:CleWin5UserGuide.pdf (is afraid of copyright violation)
14:49, 27 March 2023 Jehan talk contribs deleted page File:L-Edit User Guide.pdf (is afraid of copyright violation)
10:40, 24 March 2023 Bghe talk contribs deleted page Specific Process Knowledge/Etch/III-V RIE/III V RIE ETCHES/SiO2 DOE (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/III-V_RIE/III_V_RIE_ETCHES/SiO2_DOE click here]''' =THIS PAGE IS UNDER CONSTRUCTION200px=", and the only contributor was "Bghe" (talk))
09:01, 14 February 2023 Bghe talk contribs deleted page Oxide growth using HNO3 (content was: "hej", and the only contributor was "Mbec" (talk))
16:16, 6 February 2023 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Wafer Scriber (Rune: system no longer in the cleanroom)
14:20, 6 February 2023 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using RIE1 or RIE2/Images of 1SiO2mSi with p-Si mask (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Silicon_Oxide/SiO2_etch_using_RIE1_or_RIE2/Images_of_1SiO2mSi_with_p-Si_mask click here]''' = Both RIE's (RIE1 and RIE2) for silicon based etching has been decommissioned = ==This work was done on RIE1 which has been decommissioned but we expect the result...")
11:25, 3 February 2023 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiN Etch (content was: "==Stripping SRN from the whole wafer surface== This recipe has not been optimized for Silicon Rich Nitride but can be used for stripping one wafer side for the nitride when an over etch in the underlaying layer is not a problem.", and the only contributor was "Bghe" (talk))
15:40, 2 February 2023 Bghe talk contribs deleted page File:Section under construction.jpg (Deleted old revision 20230202141120!Section_under_construction.jpg)
11:08, 30 January 2023 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/Developer E-beam (Request from Thomas Pedersen)
07:44, 12 September 2022 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/DSC Perkin Elmer (We do not have it anymore)
12:46, 6 September 2022 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE/AOE SiO2 etch load dependency (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk? Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowled..." (and the only contributor was "BGE"))
14:28, 29 August 2022 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE/test page (content before blanking was: "[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Etching_of_Silicon_Oxide/SiO2_etch_using_AOE/test_page click here]")
13:15, 29 August 2022 Bghe talk contribs deleted page Quantitative electron microscopy of 2D materials (wrong position)
13:00, 29 August 2022 Bghe talk contribs deleted page LabAdviser/CEN/Inspect S (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=LabAdviser/CEN/Inspect_S click here]''' <!-- Replace "http://labadviser.danchip.dtu.dk...")
07:44, 10 August 2022 Bghe talk contribs deleted page \\aitpcifs02\Nlab$\CleanroomDrive\lgpe\E-beam\TRAINING (content was: "O:\CleanroomDrive\lgpe\E-beam\TRAINING" (and the only contributor was "Lgpe"))
07:44, 10 August 2022 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/SDF JDF Training (Thomas P)
12:05, 23 March 2022 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Packlab Plasma Asher Pico 2 (content was: "'''Feedback to this page''': '''[mailto:fabricationsupport@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Back-end_processing/Packlab_Plasma_Asher_Pico_2 cli...")
17:58, 31 January 2022 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/Oxidation/Oxidation on III-V furnace (D4) (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_furnace_(D4) click h...")
17:55, 31 January 2022 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Focal Spot X-ray system (content was: "==Focal Spot Verifier FSX-090== 250x250px|thumb|Verifier Focal Spot X-ray system is located in Packlab, Building 347, 1st floor Image:P..." (and the only contributor was "Kabi"))
11:20, 24 January 2022 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Polymer Injection Molder/Demoulding (content before blanking was: "== Demolding == Demolding is the process of opening the mold and thereby pulling the sample off the shim. Many of the previously mentioned parameter will influence the demolding process. Generally, the higher mold temper...")
14:16, 14 October 2021 Bghe talk contribs deleted page Specific Process Knowledge/Characterisation/XPS/Processing/ALDSandwich1/1Open (content before blanking was: "= Prepare the spectra for analysis = Double click on the ''Experiment 2.VGX'' file and Avantage should start. If you open from Avantage, remember to select 'All files *.*' to be able to find the *.VGX file. File:ALD-S...")
12:45, 29 September 2021 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/processA/ProcessLog (content was: "  This page must be deleted." (and the only contributor was "Jmli"))
12:44, 29 September 2021 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/PulseEnergy (content before blanking was: " {| border="1" cellspacing="2" cellpadding="2" !image:140618_LaserPulseEnergy_IPG_v2.jpg|500x500px|thumb|center|Laser pulse energy for nanosecond laser wavelength (IPG 1064nm, F255mm). Tested with 1, 3 and 8 burst puls...")
13:26, 18 August 2021 Bghe talk contribs deleted page LabAdviser/CEN/Quanta 3D FIB/SEM (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=LabAdviser/CEN/Quanta_3D_FIB/SEM click here]''' <!-- Replace "http://l...")
08:52, 12 August 2021 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Reactivly sputtered SiO2 in Sputter-System Metal Oxide (PC1) (content before blanking was: " =Reactive sputtering of SiO2= This page presents the results of SiO2 deposition using RF reactive sputtering in Specific_Process_Knowledge/Thin_film_deposition/Cluster-based_multi-chamber_...")
15:24, 28 April 2021 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus 4/Barc etch (content before blanking was: "==Barc etch with O2== ''By bghe@nanolab June 2020'' ===Sample=== *6" Si * 2µm SiO2 from C1 *90nm barc *907 nm UVN 2030-0,5 *Reticle: Pegreticle *Dose: 200 J/m2 ===Pegasus 4 settings=== *Recipe: Barc O2 *With 30 mm spacer...")
13:24, 21 January 2021 Bghe talk contribs deleted page Editing Specific Process Knowledge/Thin film deposition/Deposition of polysilicon/Deposition of polysilicon using LPCVD/Standard recipes, QC limits and results for the 4" polysilicon furnace/Boron doped poly-Si and a-Si (content was: "=THIS PAGE IS UNDER CONSTRUCTION200px=")
14:08, 12 November 2020 Jehan talk contribs deleted page Specific Process Knowledge/Thin film deposition/III-V Dielectric evaporator/SettingImages (content was: "=== Images of Settings files for Dielectric evaporator === UNDER CONSTRUCTIONimage:Under_construction.png|70px..." (and the only contributor was "Jehan"))
14:15, 18 June 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AlN deposition using ALD2/Acceptance test AlN (content was: "==AlN with N2 plasma==  The test was done with 300 cycles at 350 °C where the growth rate was measured to be '''0.0625 nm/cycl..." (and the only contributor was "Eves"))
13:58, 18 June 2020 Bghe talk contribs deleted page Technology Development of Nanoscale Silicon Plasma Etching Process (content was: "=Technology Development of Nanoscale Silicon Plasma Etching process for Novel Devices and Applications= *'''Project type:''' Ph.D. project *'''Project responsible..." (and the only contributor was "Vthongu"))
09:43, 6 May 2020 Bghe talk contribs deleted page LabAdviser/Technology Research/Cleanroom fabrication of 3D electrodes with lithography and pyrolysis (content was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Technology_R..." (and the only contributor was "Bghe"))
14:55, 24 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Electroplating-Cu (Request fra Rebecca)