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The SEM Tool Package Training

DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). This course is mandatory for academic users who want to perform SEM imaging at Nanolab unless you will only use the Hitachi TM3030 tabletop SEM. The course includes theory on scanning electron microscopy (including some reading and online lectures) followed by by quizzes for each section, as well as training videos for equipment operation. After completing the online course, a practical group training can be arranged.

The SEMs at DTU Nanolab are located in building 314/307 and 346. Different SEMs are used for different applications, and the practical training requirements differ from building to building and from SEM to SEM. The main SEM and TEM building is 314/307, which is open for all users from academia and industry. The SEMs in building 346 are reserved for users who work with fabrication at Nanolab, i.e., in the cleanroom or the other labs in buildings 346 and 347.

The SEM TPT course is available via DTU Learn. You can find it and enroll yourself here.

Course Plan (Building 314/307)

SEMs for all users from academia and industry; main SEM facility at DTU Nanolab. To gain access to the microscopes in building 314/307, please register here and sign up for the theoretical online course (SEM TPT) in DTU Learn here.

You will receive an invitation to a meeting at 314 to discuss your project and requirements. The structure of the hands-on training depends heavily on the type of sample, type of characterization, i.e., which SEM, detectors, and sample preparation technique will be used, as well as previous user experience.

Apply for access to SEMs in building 314/307 (here)
Meeting at 314 to discuss your project
Register for SEM TPT in DTU Learn (here)
SEM TPT: Online reading & lecture videos (theory) (*)
SEM TPT: Quiz (*)
Introduction course for Nanolab facility (NOT Cleanroom) in DTU Learn
Introduction course for access to building 314/307 in DTU Learn
Individual hands-on training

(*) As an alternative to watching the lecture videos and completing the quiz online, an in-person lecture is offered occasionally, mostly in combination with PhD courses or 3-week courses. Contact the building 346 SEM group or check the course page in DTU Learn for the next date.

Course Plan (Building 346)

SEM related to fabrication carried out at DTU Nanolab. To gain access to the SEMS in building 346 you need to have access to the cleanroom (please sign up here) or access to the basement in 346 (please sign up here). Please sign up for the theoretical online course (SEM TPT) in DTU Learn here.

Register to gain access to building 346 (basement 346 or cleanroom)
Register for SEM TPT in DTU Learn (here)
SEM TPT: Online reading & lecture videos (theory) (*)
SEM TPT: Quiz (*)
Online training videos on equipment operation
Read SEM Supra 1 manual
Group hands-on training on SEM Supra 1 (basement 346) requested via sem@nanolab.dtu.dk (**)
Individual hands-on training on SEM Supra 1 (basement 346) or SEM Supra 3 (cleanroom) requested via training@nanolab.dtu.dk

(*) As an alternative to watching the lecture videos and completing the quiz online, an in-person lecture is offered occasionally, mostly in combination with PhD courses or 3-week courses. Contact the SEM group or check the course page in DTU Learn for the next date.

(**) If a group hands-on training session not available in a timely manner, two individual hands-on training sessions can be arranged.

Commercial Users: The theoretical part of the SEM TPT (3. and 4.) is not mandatory for commercial users, though we strongly recommend it for new SEM operators. All users must watch the online training videos explaining the equipment operation (5.) specific to our Zeiss SEMs and read the manual (6.) of the relevant SEM prior to the hands-on training. If you do not think a group training (7.) is appropriate for your company, please contact the 346 SEM group to arrange two individual trainings.

Qualifying Prerequisites

Cleanroom safety course (sign up here), or
Intro building 346 (sign up here, choose option: "Basement, polisher lapper/155 and dicer/157")

Material for preparations and further information

Please watch before the first hands-on training:

Equipment operation training videos (10 videos, total duration < 30 min)

Please read the SEM manuals before the second hands-on training:

SEM Supra 1 manual (outside cleanroom: 346/904)
SEM Supra 2 manual
SEM Supra 3 manual
SEM Gemini 1 manual
SEM Tabletop 1 manual (outside cleanroom: 346/151)

General course info

Learning objectives

Explain SEM electron optics and detectors
Understand possibilities and limitations of SEM
Know how to optimize SEM images
Know which tool to use and who to contact

Course Responsible

Jonas Michael-Lindhard (346)
Rebecca Bolt Ettlinger (346)
Berit Wenzel (314/307)
Marie Karen Trace Hong Lin (314/307) - Softmatter and life science samples

If you have questions you can contact us via SEM@nanolab.dtu.dk.