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This page is written by DTU Nanolab staff.
The SEM TPT
DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). The course includes theory on SEM, as well as training in instrument operation.
This course is mandatory for all users who want to perform SEM imaging at Nanolab unless you will only use the Hitachi TM3030 tabletop SEM in building 451. The course consists of some reading and a lecture. After the lecture, practical SEM trainings will be arranged.
The SEMs at DTU Nanolab are located in building 314, 346, 375, and 451. Different SEMs are used for different applications, and how the practical training is conducted differs for the different buildings and in some cases also for the individual SEMs. The main SEM and TEM building is 314, which is open for all users from academia and industry. The SEM in building 451 is a very simple tabletop SEM and the SEM in building 375 is for DTU Offshore. The SEMs in building 346 are reserved for users who work with fabrication at Nanolab, i.e., in the cleanroom or the other labs in buildings 346 and 451.
| Scanning Electron Microscopy (SEM) Tool Package Training (TPT) course
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| Schedule
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All participants
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Theoretical part:
- Consists of reading material (approx. 2 hours) and a lecture (just over 3 hours).
- The lecture is held in person at DTU approximately once a month. See below for sign-up.
- It is also possible to see some videos instead of attending the lecture in person. Again, see below under sign-up.
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SEM users in building 314 and 375
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Practical part:
- Depending on the type of sample and type of characterization, i.e., what SEM, detectors, and sample preparation technique will be used, users will get one or more individual trainings at the SEM they are going to use before they can be authorized to operate the SEM alone.
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SEM users in building 346
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Practical part:
- Users first attend a 2-hour SEM training session in groups of 2-3 people. For this training SEM Supra 1 will be used to study standard training samples.
- After the group session, users have one or more individual trainings before they are authorized to operate the SEM alone. Users should bring their own sample for the individual training(s).
- Notice that if you need to bring a sample out of the cleanroom for individual training on SEM Supra 1, you will have to clean it to bring it back into the cleanroom.
- After at least four hours of independent SEM Supra 1 usage (after the training sessions), users can request additional trainings for the SEM Supra 2 and 3 in the cleanroom.
- In some cases the user may transition straight to individual training on Supra 2 and 3 after the group training. Ask staff if this may apply to you.
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| Prerequisites
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All participants
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| Preparations
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All participants
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Before the lecture:
- All participants should know in which building they are going to use SEM. If you are in doubt, please fill out the SEM access request form.
- Read the "Scanning Electron Microscopy Primer" by Bob Hafner and some notes that lists the differences between the SEMs described in the primer and the SEMs at DTU Nanolab (mainly the SEMs in building 346).
You can find the preparation material in DTU Learn, on our common drive: U:\Nlab\CleanroomDrive\SEM TPT, or online: SEM Primer (included with permission from the author)
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SEM users in building 314 and 375
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- The responsible persons will tell you what you have to prepare. This depends on what SEM(s) you will have to use.
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SEM users in building 346
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Before the first group training session:
Before the individual training session(s):
- Read the user manual for SEM Supra 1. This can be found in LabManager here
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| Sign-up for the course
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SEM users in building 314 and 375
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- Fill out a SEM access request form.
- Meet and discuss with SEM responsible about a suitable SEM sample preparation and SEM technique.
- Sign up for the in-person lecture in DTU Learn under Groups or watch the videos of the lecture on the same course site (they were made as a recording of a lecture on Zoom during Corona, so they are not of the ultimate quality).
- After the SEM lecture, reach out to the SEM responsible person from building 314/375 to arrange for SEM hands on sessions at building 314/375. The SEM responsible will contact you within 7 days to arrange two SEM hands on sessions.
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SEM users in building 346
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- We assume you are already registered as a user at Nanolab since you have access to LabAdviser.
- Sign up for the in-person lecture in DTU Learn under Groups or watch the videos of the lecture on the same course site (they were made as a recording of a lecture on Zoom during Corona, so they are not of the ultimate quality).
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| Location
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All participants
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Theoretical part:
- The location of the in-person lecture is announced in DTU Learn and/or by email a couple of days in advance.
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SEM users in building 314 and 375
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Practical part:
- Building 314 or 375, depending what SEM(s) you have to use
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SEM users in building 346
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Practical part:
- The SEM Supra 1 located in building 346 room 904 (basement). The meeting point will be at the stairs to the basement in building the 346 or by the SEM.
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| Learning objectives
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All participants
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The first part of the lecture provides an introduction to SEM theory including electron optics and image formation. The second part of the lecture concerns practical details about the SEMs at DTU Nanolab including the detectors, sample preparation, and tips and tricks. Thus all participants should be able to:
- Explain SEM electron optics and detectors
- Understand possibilities and limitations of SEM
- Know how one should optimize SEM images
- Know where to go after the lecture – which tool and who to contact
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| Course responsible
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All participants
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- General questions about the SEM TPT course can be sent to SEM@nanolab.dtu.dk
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SEM users in building 314 and 375
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- Berit Wenzell (bewe@dtu.dk)
- Marie Karen Tracy Hong Lin (mktracy@dtu.dk) - Softmatter and life science samples
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SEM users in building 346
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- The SEM responsible in building 346. Contact email: SEM@nanolab.dtu.dk
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| Lecture slides
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All participants
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The slides from the presentation can be found on LabManager as three separate files (requires login):
- Slides 1-31 with introduction and theory
- Slides 32-49 about image optimization (continued), EDX, and some info on practical SEM operation
- Slides 50-106 about practical SEM operation, tips and troubleshooting.
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