File:Borondopedpoly 273nm.jpg
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Borondopedpoly_273nm.jpg (400 × 426 pixels, file size: 27 KB, MIME type: image/jpeg)
Surface roughness measured with AFM. Boron doped polySi 273 nm.
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 14:26, 26 September 2012 | 400 × 426 (27 KB) | Pvl (talk | contribs) | Surface roughness measured with AFM. Boron doped polySi 273 nm. |
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The following 3 pages use this file:
- Specific Process Knowledge/Thin film deposition/Deposition of Silicon/Deposition of Polysilicon using the 6" Polysilicon Furnace
- Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon/Boron doped poly-Si
- Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon/Standard recipes, QC limits and results for the 6" polysilicon furnace
