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- 16:04, 17 January 2023 Bghe talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/Images SiO2RIE (Created page with "=Some images from the DOE experiments= Some of the images are with the resist still on and some are after a plasma ashing where the redeposition on the resist wall are clearly less behind. 400px|thumb|experiment no. 1|")