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Specific Process Knowledge/Lithography/Aligners/MAvsMLA

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Slides presented at NNUM in Uppsala 2026

MA6 vs MLA 2026_v09

Additional data

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Mask Aligner

Resolution

Linewidth

Sidewall angle

Maskless Aligner

Resolution

Linewidth

Sidewall angle

AZ 5214E

Resolution/yield

Linewidth/bias

Sidewall angle

AZ MiR 701

Resolution/yield

Linewidth/bias

Sidewall angle

AZ nLOF 2020

Resolution/yield

Linewidth/bias

Sidewall angle