LabAdviser/Courses
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Introductory Courses to DTU Nanolab Facilities
We have made a number of courses to prepare our users for their work in our cleanroom facility and available equipment, as well as training for our other facilities. Below you find a list of available courses. The Safety Introduction Course is mandatory for all users that need to use our cleanroom facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you want to use.
| Course | Mandatory ... | Short Course Decription |
|---|---|---|
| Safety Introduction Course | for working inside the cleanroom | Theoretical and practical safety training. All new cleanroom users must obtain DTU Nanolab’s introduction course certificate before access to the cleanroom is granted. Find more information and sign up here. |
| Safety Introduction Course for "Other Facilities" | for working in other Nanolab facilities | DTU Nanolab offers a range of open access laboratories dedicated to both fabrication and characterization purposes. These facilities are situated in buildings 314/307, 346, and 347. Find more information and sign up here. |
| Lithography TPT | for working with Lithography Equipment | This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the Lithography TPT and sign up here. |
| SEM TPT | for getting access to SEMs in 346 and 314/307 | This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. It is also irregularly held as in-person lecture at DTU Nanolab. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346 at DTU Nanolab. Find more information on the SEM TPT and sign up here. |
| Dry Etch TPT | for getting access to Dry Etch Equipment | This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the Dry Etch TPT and sign up here |
| Thin Film TPT | for getting access to Thin Film Deposition & Thermal Growth Equipment | This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the Thin Film TPT and sign up here. |
Links to training videos
DTU Nanolab has a YouTube channel where we have gathered all our training videos: [1]
We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube
Safety and behavior
- Nanolab introduction course: Safety in the Cleanroom [2]
- Cleanroom safety at DTU Nanolab [3]
- Working with chemicals in the cleanroom at DTU Nanolab [4]
- Behaviour in the cleanroom at DTU Nanolab [5]
- Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [6]
Labmanager and Labadviser
- Playlist: DTU Nanolab systems (Labmanager and Labadviser)[7]
Wet chemistry
- Training in fume hoods part 1 - Intro and Getting Started [8]
- Training in fume hoods part 2 - Working With Acids, Bases and Solvents [9]
- Training in fume hoods part 3 – Wet benches and errors [10]
- Using Quick Dump Rinse Baths [11]
- Native Silicon Dioxide Removal [12]
Lithography
- Playlist: Lithography TPT - lecture videos [13]
- Playlist: Lithography TPT - tool training (Spin Coater, Mask Aligner MA6-2, Automatic Puddle Developer) [14]
- Playlist: Lithography TPT - tool training (Maskless Aligner) [15]
Thin Film deposition and oxidation
- Playlist: E-beam evaporator (Temescal) [20]
- Lesker dual chamber sputter system at DTU Nanolab [21]
- Antistiction treatment [22]
- Furnace training: Oxidation furnace [23]
Dry Etch
Characterization
- Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [26]
- Playlist: AFM Icon Nanoscope software training part I/II/III [27]
- Ellipsometer training [28]
- Playlist: XPS [29]
Backend tools
- Disco Dicing saw - blade exchange [30]