LabAdviser/Courses/TPT SEM

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The SEM TPT

DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). This course is mandatory for all users who want to perform SEM imaging at Nanolab unless you will only use the Hitachi TM3030 tabletop SEM (building 346/room 151). The course includes theory on scanning electron microscopy (including some reading and online lectures) followed by by quizzes for each section, as well as training videos for equipment operation. After completing the online course, a practical group training will be arranged. Once completed successfully, you can request personal hands-on training for the equipment in building 346 via training@nanolab.dtu.dk. For SEMs and TEMs located in 314/307 or 375 (DTU Offshore), please sign up here.

The SEMs at DTU Nanolab are located in building 314/307, 346, and 375. Different SEMs are used for different applications, and how the practical training is conducted differs for the different buildings and in some cases also for the individual SEMs. The main SEM and TEM building is 314/307, which is open for all users from academia and industry. The SEM in building 346 is a very simple tabletop SEM and the SEM in building 375 is owned by DTU Offshore. The SEMs in building 346 are reserved for users who work with fabrication at Nanolab, i.e., in the cleanroom or the other labs in buildings 346.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout (Building 314/307 and 375)

1. Online reading & lecture videos (theory)
2. Quizzes for each section
3. Individual hands-on training
   

The structure of the hands-on training depends heavily on the type of sample, type of characterization, i.e., which SEM, detectors, and sample preparation technique will be used, as well as previous experience by the user. To request training, please contact us here.


Course Layout (Building 346) - Academic Track: "Students and Staff"

1. Online reading & lecture videos (theory)
2. Quizzes for each section
3. Online training videos (equipment operation)
4. Read SEM Supra 1 manual
5. Group hands-on training (SEM Supra 1 in basement 346)
6. Individual hands-on training (commonly SEM Supra 1 in basement 346 or SEM Supra 3 in cleanroom)
   

The online lecture (theory) is occasionally offered (on irregular basis), mostly in combination with PhD courses or similar. You can contact the SEM group to inquire for a date. Individual hands-on training can be requested via training@nanolab.dtu.dk.

Course Layout (Building 346) - Commercial Track: "Company Users"

1. optional: Online reading & lecture videos (theory)
2. optional: Quizzes for each section
3. Online training videos (equipment operation)
4. Read SEM Supra 1 manual
5. Group hands-on training (SEM Supra 1 in basement 346)*
6. Individual hands-on training (commonly SEM Supra 1 in basement 346, esle SEM Supra 3 in the cleanroom)*
   

(*) If a group hands-on training session is timely available, company users are expected to join the group session, else two individual hands-on training sessions can be arranged. Individual hands-on training can be requested via training@nanolab.dtu.dk.

Learning objectives

• Explain SEM electron optics and detectors
• Understand possibilities and limitations of SEM
• Know how to optimize SEM images
• Know which tool to use and who to contact

Qualifying Prerequisites

• Intro to building 346 (Basement, polisher lapper/155 and dicer/157) must be obtained before the group training session, or
• Access Cleanroom safety course at DTU Nanolab must be obtained before the group training session

Course Responsible

• Jonas Michael-Lindhard (346)
• Rebecca Bolt Ettlinger (346)
• Berit Wenzel (314/307)
• Marie Karen Trace Hong Lin (314/307) - Softmatter and life science samples

General question regarding the TPT can be send to SEM@nanolab.dtu.dk.

Material for preparations and further information (see also DTU Learn)

Pre hands-on training videos
(Watch before the hands-on training)

• The 10 Hands-on training vidoes can be found on YouTube: Equipment operation training videos (mandatory before Hands-on Session)

SEM Manuals (346)
(Read before the hands-on training)

• SEM Supra 1 manual (outside cleanroom: 346/904)
• SEM Supra 2 manual
• SEM Supra 3 manual
• SEM Gemini 1 manual
• SEM Tabletop 1 manual (outside cleanroom: 346/151)