Specific Process Knowledge/Back-end processing/Micro transfer printer

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Micro Transfer Printer

Micro transfer printing is an emerging technique to transfer diverse and non-native components from source substrate to target substrate. Micro transfer printing is best for achieving heterogeneous integration, where micro-components from different sources are picked up by polymer stamp and preciesly assembled onto different target substrate such as glass, plastic, ceramic and silicon. This method is known for increasing functinality and improving efficiency.


Equipment info in LabManager - requires login

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Equipment performance and process related parameters

Purpose UV exposure
Performance Exposure mode
  • Flood exposure
  • Proximity exposure with mask possible for 4inch substrate
  • Inclined exposure
  • Rotating exposure
Exposure light/filters
  • Near UV(350-450nm)
  • Mid UV (260-320nm)
  • Deep UV(220-260nm)
Minimum structure size
Mask size

5x5inch optinal

Alignment modes

No alignment possible

Substrates Substrate size

Up to 8inch substrates, different shapes

Allowed materials

All cleanroom materials

Batch

1