Specific Process Knowledge/Characterization/XRD/XRD SmartLab

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XRD SmartLab

The Rigaku SmartLab is an advanced XRD for measuring on thin films. All thin films can be measured without fixating the sample, as the system has a so called In-Plane arm.

The XRD SmartLab located in cleanroom F-2


The user manual(s), user APV(s), technical information, and contact information can be found in LabManager:

XRD SmartLab in LabManager - requires login


Various measurement types including X-Ray reflectivity, Rocking curve, Theta-2theta, and Pole figures are described here:

Process information


The measurement settings and results of the pre-acceptance test are described in this document, also found on the Lab Manager:

The same measurement were completed as part of the acceptance, but no report was generated. In addition the inspection certificate is available here:


Software for analysis

Please see the Data Analysis section at the main XRD page.

Characterization of thin films using X-ray reflectivity (XRR)

Implementing the XRR method the user can calculate thickness, density, and roughness of the deposited material. The XRR is also widely employed for multilayer stack analysis.

Here are some results available:


Equipment performance and process related parameters

Equipment XRD SmartLab
Purpose Crystal structure analysis and thin film thickness measurement
  • Phase ID
  • Crystal Size
  • Crystallinity
  • Quality and degree of orientation
  • 3D orientation
  • Latice strain
  • Composition
  • Twist
  • 3D lattice constant
  • Thickness
  • Roughness
  • Density
X-ray generator

Maximum rated output

3 kW

Rated tube voltage

20 to 45 kV

Rated tube current

2 to 60 mA

Type

Sealed tube

Target

Cu

Focus size

0.4 mm x 8 mm (Line/Point)

Goniometer

Scanning mode

incident / receiver coupled or independent

Goniomenter radius

300 mm

Minimum step size

0.0001° (0.36")

Sample stage

  • χ:-5~+95°
  • φ:0~360°
  • Z:-4~+1 mm
  • X,Y:±50 mm for a 100 mm wafer
  • Rx,Ry:-5~+5°

Sample size

Diameter: 150 mm Thickness: 0~21 mm

Optics Incident side
  • Cross Beam Optics(CBO)
  • Ge(220)x2 monochromator
  • In-Plane Parallel Slit Collimator (PSC)
  • Soller slit
  • Variable divergence slit
Receiver side
  • Automatic variable scattering slit
  • Automatic variable receiver slit
  • Parallel slit analysers (PSA)
  • Ge(220)x2 analyser
Substrates Substrate size

up to 150 mm wafers

Allowed materials

All materials


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