Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/Images SiO2RIE

Some images from the DOE experiments

This section is done by Berit Herstrøm @Nanolab
Some of the images are with the resist still on and some are after a plasma ashing where the redeposition on the resist wall are clearly less behind.

Experiment no. 1

Experiment no. 2

Experiment no. 5

Experiment no. 6

Experiment no. 7

Experiment no. 8

Experiment no. 9

Experiment no. 10

Experiment no. 11

Experiment no. 13

Experiment no. 15

Experiment no. 16