Specific Process Knowledge/Characterization/Optical microscope

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	Nikon SMZ 1000	Noco IR	Leica INM 100	Nikon Eclipse L200 #2	Zeiss Jenatech	Nikon Eclipse L200 #1	Leitz Medilux	Nikon Eclipse L200N #3	Nikon Eclipse L200N #4	Nikon ME 600	Leica S8 APO	Zeiss Axiotron

Location	346-901	346-901	346-901	cleanroom B1	cleanroom A1	cleanroom D3	cleanroom D3	cleanroom E4	cleanroom E5	cleanroom F1	cleanroom F2	cleanroom F3
Responsible group	Wet chemistry	Wet chemistry	Wet chemistry	Thin Film	Thin Film	Thin Film	Thin Film	Lithography	Lithography	Thin Film	Thin Film	Lithography
Objectives	Zoom 0.8x - 8x	2.5x 10x 20x 50x	2.5x 5x 10x 20x 50x	2.5x 5x 10x 20x 50x 100x	5x 10x 20x 50x 100x	2.5x 5x 10x 20x 50x 100x	2.5x 5x 10x 20x 50x	2.5x 5x 10x 20x 50x 100x	2.5x 5x 10x 20x 50x 100x	5x 10x 20x 50x 100x	Zoom 1x - 8x	5x 10x 20x 50x
Ocular	10x	10x	10x	10x	10x	10x	10x	10x	10x	10x	10x	10x
Special features	Stereoscopic microscope	IR imaging				Motorized stage Auto scan guide					Stereoscopic microscope
Contrast mechanisms	Brightfield	Polarizer Brightfield	Brightfield Darkfield	Brightfield Darkfield	Polarizer Brightfield	Brightfield Darkfield	Brightfield	Polarizer Brightfield Darkfield	Polarizer Brightfield Darkfield	Polarizer Brightfield Darkfield	Brightfield	Brightfield Darkfield
Illumination modes	Episcopic	Episcopic Diascopic	Episcopic Diascopic	Episcopic Diascopic	Episcopic Diascopic	Episcopic Diascopic	Episcopic Diascopic	Episcopic Diascopic	Episcopic Diascopic	Episcopic	Episcopic	Episcopic Diascopic
Camera	None	IR camera	DS-Fi2	DS-Fi1	None	DS-Fi1	DX40-274FW	DS-Fi2 C-mount, 0.7x relay	DS-Fi2 C-mount, 0.7x relay	DS-Fi2	None	Infinity X
Analysis software	None	None	NIS-D	NIS-D	None	NIS-BR	Kappa Control Center	NIS-D	NIS-D	NIS-D	None	DeltaPix