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Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside along with training for our other facilities. Below you can see the courses that are presently running. The introduction Courses is mandatory for all users that need to use our facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

Course	Mandatory...	Short Course Decription
Cleanroom introduction course	for working inside the cleanroom	See the homepage
Other Nanolabs facilities introduction course	for working in other Nanolab facilities	See the homepage
TPT Lithography	for working with lithography	The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Mask Design	no	The course is recommended all users who intend to design their own masks for lithography.
TPT SEM	for getting access to SEMs at DTU Nanolab	The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM in building 314 and 346 at DTU Nanolab and for SEM in building 375.
TPT Dry Etch	for getting access to dry etch equipment	The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
TPT Thin Film	for getting access to thin film deposition/growth equipment	This is a theoretical course introducing the deposition and growth techniques available at DTU Nanolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.
Ph.d. course: 10868 Methods in micro and nano fabrication	for ph.d. students at Nanolab	This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.

Links to training videos

DTU Nanolab has a YouTube channel where we have gathered all our training videos: [1]

We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube

Safety/Wet chemistry

Nanolab introduction course: Safety in the Cleanroom / Sikkerhed i renrum [2]
Using Quick Dump Rinse Baths [3]
Native Silicon Dioxide Removal [4]

General purpose

Playlist: DTU Nanolab systems (Labmanager and Labadviser)[5]
Craftsmen in the cleanroom/håndværkere i renrummet. [6]

Lithography

Lithography TPT lecture [7]
Litho TPT training videos (equipment) [8]
E-beam lithography at DTU Nanolab [9]
Playlist: JEOL 9500 EBL Training (New version) [10]
- JEOL 9500 EBL Training (New version) [11]
- JEOL 9500 EBL Alignment (New version) [12]
- JEOL 9500 EBL Cassette handling (New version) [13]
Playlist: MLA [14]
Manual spin coater Labspin Training [15]
Developer: TMAH Manual [16]

Thin Film deposition and oxidation

Playlist: E-beam evaporator (Temescal) [17]
Lesker Sputter System at DTU Nanolab [18]
Antistiction treatment [19]
Furnace training: Oxidation furnace [20]

Dry Etch

Playlist: Dry Etch TPT - hands-on videos [21]
Playlist: Dry Etch TPT - Lecture videos [22]

Characterization

Playlist: SEM TPT Training videos [23]
Playlist: AFM Icon Nanoscope software training part I/II/III [24]
AFM Probe change training: [25]
Ellipsometer training [26]

Backend tools

Disco Dicing saw - blade exchange [27]