Helios 5 Hydra UX DualBeam

Reading Materials

Technical Notes

Resolution

Electron beam:
- At optimum WD: 0.7 nm at 1 kV • 1.0 nm at 500 V (ICD)
- At coincident point: 0.6 nm at 15 kV • 1.2 nm at 1 kV

Xe Ion beam resolution at coincident point:
- <20 nm at 30 kV using preferred statistical method
- <10 nm at 30 kV using selective edge method

Attachments

- PFIB column with unique inductively coupled plasma (ICP) source supporting four ion species with fast switching capability. Ion species available: Xe, Ar, O, N

- MultiChem Gas Injection System (GIS) (for W and Pt both E and I beams. C deposition E beam only. XeF2 and H2O etching Ion beam only. Check this)

- Thermo Scientific EasyLift™ NanoManipulator for precise in situ sample manipulation

- Everhart-Thornley SE detector (ETD)

- In-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE)

- EDS detector

- In-chamber Nav-Cam Sample Navigation Camera

- Integrated plasma cleaner

May have: (need to check)

- Thermo Scientific CryoCleaner Decontamination Device

- WDS

- EBSD

- Retractable low-voltage, high-contrast directional solid-state backscatter electron detector (DBS)

- Elstar Column in-lens SE/BSE detector (TLD-SE, TLD-BSE)

- Elstar Column in-column SE/BSE detector (ICD)*

To find the basic instructions for operating the instrument, the reader is referred to the labmanager manual.

Important Notes

ALWAYS make sure the EDS (and EBSD relevant?) detectors are RETRACTED when opening and closing the chamber.
Do NOT adjust the Nitrogen regulator!!! Relevant?
Always open and close the chamber GENTLY whilst viewing the live CCD image.
Only home the stage with open door or if in vacuum only with holders that you are 100% sure it is safe to do so.
Make sure you delete all saved positions before finishing your microscope section.
When moving between saved positions, BE CAREFUL! If you are unsure move the Z height to the lowest point and lock it so as not to collide with the pole piece.
Use the logbook
NEVER work without a valid link between the Z and the FWD
ONLY INSERT EBSD CAMERA if the sample is at the correct position (in case of a special EBSD holder the stage must be tilted to 16 °). Relevant?
Always use GLOVES. Only vacuum-ready samples and holders are allowed inside the chamber.
DO NOT install ANY software on either the microscope or support PC,.
Transfer your files at the end of each session. We will be deleting files from the support computer without notice.

Who may operate Helios 5 Hydra UX DualBeam

The rules of who may operate the Helios 5 Hydra UX DualBeam and to what extent they may operate it are:

Only users who have been trained and approved by DTU Nanolab personnel may operate the instrument. Irregardless of their prior experience any new user with no official DTU Nanolab training or approval cannot operate the instrument, not even under close supervision by experienced users.

Users may only use the instrument to the extent they have been trained. This means that one should not try to operate the following options/capabilities without explicit training:
- EBSD capability Relevant?'
- EDX capability
- NanoManipulator
- Plasma cleaner

Correct? Anything else?

Equipment performance and process related parameters

Process information