Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM

The DREM 0.5kW v2.3 recipe is in the standard recipe folder.

DREM 0.5 kW recipes

Recipe	General							Pressure						Gases														Generators						Matching								Tem- pera- ture	Results
														C4F8						SF6						Ar		Coil		Platen				Coil				Platen
	Platen		Stb	S/E	Dp	Et	Cyc	Dp			Et			Dp			Et			Dp			Et			Dp	Et	Dp	Et	Dp	Et			Dp		Et		Dp		Et			Runs	Keywords
	U/D	H/L						D	B	M	D	B	M	D	B	M	D	B	M	D	B	M	D	B	M						D	B	M	L	T	L	T	L	T	L	T
DREM 0.5kW v2.3	Clamp Substrate,Pump to base, home platen matching unit, barc1, stab																																										10+
	U	HF		D/E	3	2.5				100%			100%	0.3@5	0.5@10	45	0.3@25		5	0.3@20	0.5@10	10	1.9@20	0.5@30	30	75	1.5@75,75	0.5	0.5	1	0.9@1	1@40	1	45	50	45	50	41	60	41	60	0

DREM 0.2kW

DREM 0.2 kW v2

Recipe	General							Pressure						Gases														Generators						Matching								Tem- pera- ture	Results
														C4F8						SF6						Ar		Coil		Platen				Coil				Platen
	Platen		Stb	S/E	Dp	Et	Cyc	Dp			Et			Dp			Et			Dp			Et			Dp	Et	Dp	Et	Dp	Et			Dp		Et		Dp		Et			Runs	Keywords
	U/D	H/L						D	B	M	D	B	M	D	B	M	D	B	M	D	B	M	D	B	M						D	B	M	L	T	L	T	L	T	L	T
DREM 0.2kW	Clamp Substrate,Pump to base, home platen matching unit, barc1, stab																																										9
	U	HF		D/E	2.8	2.6				100%			100%	0.3@5	0.5@15	25	0.3@25		5	0.3@15	0.5@10	10	1.9@10	0.5@20	20	60	60	0.25	0.25	1	0.9@1	1@20	1	40	50	40	50	38.2	53.8	38.2	53.8	0