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QFEG 200 Cryo ESEM (FEI Quanta FEG 200)

DTU Nanolabs QFEG positioned in building 314 room no. 010

The QFEG 200 Cryo is an FEI Quanta FEG (Field Emission Gun) scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in several modes, such as high vacuum, low vacuum, environmental mode, room temperature, low temperature and cryo. Our QFEG is fitted with an EDS detector, which allows for analytical measurements in all the operation modes. With the cryo transfer system available, it is especially suited for cryo experiments.

Process information

Electron source

Field emission gun

Accelerating voltage

500 V- 30 kV

Resolution

2 nm at 30 kV (SE)

Imaging detectors

Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera

Imaging modes

High, low vacuum and environmental

Analytical capabilities

Energy dispersive X-rays (Oxford Instruments 80 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)

Attachments

Quorum PP2000 Cryo System, FEI Peltier stage (-10°C to 22°C).

Equipment performance and process related parameters

Equipment		QFEG Cryo SEM FEI Quanta FEG 200
Purpose	Vizualization and Microanalysis	Vizualization of surfaces (topography and Z contrast) Vizualization of projected image (BF STEM image) Energy Dispersive X-ray analysis (EDS)
Performance	Resolution	The resolution of QFEG dependends on the sample and the operation mode!
Performance	Resolution	2 nm at 30 keV for Au on C sample with the ETD detector
Instrument specifics	Detectors	ETD- Everhart-Thornley for secondary electrons BSD- Solid state Back Scattered Detector LFD- Large Field Detector for secondary electrons GSED- Gaseous Secondary Electron Detector GBSD- Gaseous Backscattered Electron Detector GAD- Gaseous Analystical Detector STEM- right field Scanning Tramission Electron detector vCD- low voltage BSED CCD camera
	Electron source	Field Emission - Tungsten filament
	Stage (room temperature)	X, Y: 25 × 25 mm T: 0 to 60^o (Full tilt require removment of cryo cold trap.) R: 360^o
	Peltier stage	FEI Peltier stage -10^o to 22^o
	Cryo stage	Quorum PP2000 Cryo System
	EDS	Oxford Instruments 80 mm² X-Max silicon drift detector, MnKα resolution at 124 eV
	Operating pressures	High vacuum (10^-4 Pa), Low vacuum and Enviromental mode (up to 2700Pa)
Samples	Sample sizes	No actual limit (limitted by stage movement and detector position).
	Allowed materials	Conductors, Semiconductors,Insulators,Wet Samples, Biological (not pathogens!)

Examples of the QFEG's capabilities

SEM (Scanning Electron Microscopy)

The SEM is a remarkable technique which can offer information such as the surface morphology of a sample and also a 3D appearance of the specimen. It offers the best resolution (2 nm at 30kV) at high magnification and also topographical details because of its great depth of field.

BSD (Backscattered Electron Detector)

STEM (Scanning Transmission Electron Microscopy)

ESEM (Environmental Scanning Electron Microscopy)

Cryo-SEM