Specific Process Knowledge/Characterization/XPS/ISS/Notes

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Notes on ISS

This page only has temporary notes

Calibration by Nanolab staff only

Open the ion gun dialog and select the 'Filament' tab as shown below. In the 'Auto Setup' frame select 'ISS mode' and press 'Run' as indicated by a green square below left.

When this procedure completes, press 'Calculate' in the 'Ion Source Energy' frame - highlighted by a red square.

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