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The SEM TPT
DTU Nanolab offers a Tool Package Training (TPT) course in Scanning Electron Microscopy (SEM). The course includes theory on SEM, as well as training in instrument operation.
The course is for all users who intend to perform any kind of SEM related processes, and for all new SEM users it is mandatory to attend the course.
The first part of the course is a lecture. After the lecture, practical SEM trainings will be arranged.
The SEMs at DTU Nanolab are located in building 314, 346 and 375. The SEMs are used for different applications, and how the practical trainings are conducted, differs for the different buildings and in some cases also for the different SEMs. Please be aware of, that only users who are going to work in building 346 (the cleanroom building) can get a training to the SEMs there.
| SEM Tool Package Training
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| Schedule
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All participants
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Theoretical part
- A 3-hour lecture. The first parts of the lecture provides an introduction to SEM theory including electron optics and image formation. In the second part of the lecture some more practical details about the SEMs at DTU Nanolab are presented, including a description of different detectors and some sample preparation and mounting methods.
- The lecture is held approximately once a month. The date(s), time and location for the next lecture(s) can be seen in this Doodle:
https://danchip.doodle.com/poll/udmcihbbgudyynfy
The next lecture will be held on the 20th of August.
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SEM users in building 314 and 375
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Practical part
- Depending on what samples you have and how these should be characterized, i.e. what SEM techniques and detectors you have to use, you will get one or more individual trainings to each SEM that you are going to use, before your will be authorized to use the SEM(s) yourself.
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SEM users in building 346
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Practical part
- Users will first have to attend a two hour SEM training session in groups of 2-3 persons. For this training the SEM Supra 1 will be used, and some different training samples will be analyzed.
- After the group training session, users should have one or more individual training to the SEM Supra 1, before they will be authorized to use the SEM alone. Users should bring their own sample for the training(s).
- After at least four hours of independent SEM Supra 1 usage, users can request additional trainings for the SEMs in the cleanroom.
- A 2-hour training session, max. 3 persons per session will be planed after the lecture
- A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
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| Sign up for the course
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SEM users in building 314 and 375
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- Fill out a SEM access request form:
https://www.nanolab.dtu.dk/english/microscopes/use-of-our-facilities The SEM responsible persons from building 314 will then contact you within 7 days to arrange a meeting and discuss your needs. At the meeting you will be signed up for the SEM TPT course
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SEM users in building 346
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Add you name and e-mail address to the Doodle: https://danchip.doodle.com/poll/udmcihbbgudyynfy
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| Location
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All participants
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Theoretical part
- The location of the lecture will be notified on the Doddle or after you have signed up
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SEM users in building 314 and 375
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Practical part
- Building 314 or 375, depending on where you are going to SEM
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SEM users in building 346
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Practical part
- The SEM Supra 1 is used a training instrument. This SEM is located in building 346 room 904 (basement). The meeting point will be at the SEM Supra 1
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| Qualified Prerequisites
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All participants
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| Preparations
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All participants
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Before the lecture
- All participants should know, in in which building(s) they are going to use SEM. If you are in doubt, the please fill out this SEM access request form: https://www.nanolab.dtu.dk/english/microscopes/use-of-our-facilities
- Read the "Scanning Electron Microscopy Primer" by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Nanolab (mainly the SEMs in building 346). You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here. All participant will also get an email with the preparation material a couple of days before the lecture.
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SEM users in building 314 and 375
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SEM users in building 346
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Before the first group training session
Before the one-on-one hands-on training
- Read the user manual for SEM Supra 1. This can be found in LabManager here
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| Course responsible
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All participants
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General questions to the SEM TPT course can be send to SEM@nanolab.dtu.dk
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SEM users in building 314 and 375
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Berit Wenzell (bewe@dtu.dk) and Marie Karen Tracy Hong Lin (mktracy@dtu.dk)
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SEM users in building 346
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The SEM responsible persons in building 346. Contact email: SEM@nanolab.dtu.dk
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| Learning Objectives
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All participants
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- Explain SEM electron optics and detectors
- Understand possibilities and limitations
- Optimize SEM images
- Know where to go after the lecture – which tool and where
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Slides from the lecture
But the links to sign up for the for lectures, preparation materials etc. can still be used.