LabAdviser/Courses/TPT SEM

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The SEM TPT

DTU Nanolab has a number of SEMs (Scanning Electron Microscopes) for different applications. These SEMs are located in building 314, 346 and 375. Please be aware of, that only users who are going to work in building 346 (the cleanroom building) can get a training to the SEMs there. Using the SEMs in the cleanroom means that you are doing processes in the cleanroom and that your samples are not leaving it before characterization.

DTU Nanolab offers a Tool Package Training (TPT) course in SEM; the course includes theory on SEM, as well as training in instrument operation.

First all participants will have to attend a lecture. After the lecture, practical SEM trainings will be arranged. How these are conducted, differs from the three buildings and in some case also for the different SEMs.

The course is for all users who intend to perform any kind of SEM related processes, and for all new SEM users it is mandatory for all new SEM users.

SEM Tool Package Training
Schedule	All participants	Theoretical part A 3-hour lecture. The first parts of the lecture provides an introduction to SEM theory including electron optics and image formation. In the second part of the lecture some more practical details about the SEMs at DTU Nanolab are presented, including a description of different detectors and some sample preparation and mounting methods. The lecture is held approximately once a month. The dates for the next lecture(s) can be seen in this Doodle: https://danchip.doodle.com/poll/udmcihbbgudyynfy The next lecture(s) will be held on the 10th of August and/or on the 20th of August. Please sign up for both lectures, if you are available both days. Hopefully, the lectures can be held on DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make online lectures instead or to arrange an extra lecture. If you sign up for the lecture(s), you will get more information later. If you need to use an SEM before the lectures, please write to SEM@nanolab.dtu.dk.
	SEM users in building 314 and 375	Practical part Depending on what samples you have and how these should be characterized, i.e. what SEM techniques and detectors you have to use, you will get one or more individual trainings to each SEM that you are going to use, before your will be authorized to use the SEM(s) yourself.
	SEM users in building 346	Practical part Users will first have to attend a two hour SEM training session in groups of 2-3 persons. For this training the SEM Supra 1 will be used, and some different training samples will be analyzed. After the group training session, users should have one or more individual training to the SEM Supra 1, before they will be authorized to use the SEM alone. Users should bring their own sample for the training(s). After at least four hours of independent SEM Supra 1 usage, users can request additional trainings for the SEMs in the cleanroom. A 2-hour training session, max. 3 persons per session will be planed after the lecture A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
Sign up for the course	All participants	xxx
	SEM users in building 314 and 375	Fill out a SEM access request form: https://www.nanolab.dtu.dk/english/microscopes/use-of-our-facilities The SEM responsible persons from building 314 will then contact you within 7 days to arrange a meeting and discuss your needs. At the meeting you will be signed up for the SEM TPT course
	SEM users in building 346	Add you name and e-mail address to the Doodle: https://danchip.doodle.com/poll/udmcihbbgudyynfy
Location	All participants	Theoretical part The location of the lecture will be notified on the Doddle or after you have signed up
	SEM users in building 314 and 375	Practical part Building 314 or 375, depending on where you are going to SEM
	SEM users in building 346	Practical part The SEM Supra 1 is used a training instrument. This SEM is located in building 346 room 904 (basement). The meeting point will be at the SEM Supra 1
Qualified Prerequisites	All participants	None
Preparations	All participants	All participants: Before the lecture Before the lecture, all participants should know, in in which building(s) they are going to use SEM. If you are in doubt, then the please fill out this SEM access request form: https://www.nanolab.dtu.dk/english/microscopes/use-of-our-facilities Read the "Scanning Electron Microscopy Primer" by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Nanolab (mainly the SEMs in building 346). You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here. All participant will also get an email with the preparation material a couple of days before the lecture.
	SEM users in building 314 and 375	xxx
	SEM users in building 346	Before the first group training session Watch the training videos. You can find them on YouTube: https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj Before the one-on-one hands-on training Read the user manual for SEM Supra. This can be found in LabManager here
Course responsible	All participants	General questions to the SEM TPT course can be send to SEM@nanolab.dtu.dk
	SEM users in building 314 and 375	Berit Wenzell (bewe@dtu.dk) and Marie Karen Tracy Hong Lin(mktracy@dtu.dk)
	SEM users in building 346	The SEM responsible persons 346. Contact email: SEM@nanolab.dtu.dk
Learning Objectives	All participants	Explain SEM electron optics and detectors Understand possibilities and limitations Optimize SEM images Know where to go after the lecture – which tool and where
	SEM users in building 314 and 375	xxx
	SEM users in building 346	xxx

Slides from the lecture

• Lecture slide show Media:Nanolab_SEM_lecture_2020_June_LabAdviser.pptx