LabAdviser/Courses/TPT SEM

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The SEM TPT

DTU Nanolab has a number of SEMs (Scanning Electron Microscopes) for different applications. These SEMs are located in building 314, 346 and 375.

DTU Nanolab offers a Tool Package Training (TPT) course in SEM; the course includes theory on SEM, as well as training in instrument operation.

The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab.

SEM Tool Package Training
Schedule	All participants	Theoretical part A 3-hour lecture. The first parts of the lecture provides an introduction to SEM theory including electron optics and image formation. In the second part of the lecture some more practical details about the SEMs at DTU Nanolab are presented, including a description of different detectors and some sample preparation and mounting methods. Sign up for here: https://danchip.doodle.com/poll/udmcihbbgudyynfy. The next lecture(s) will be held on the 10th of August and/or on the 20th of August. Please sign up for both lectures, if you are available both days. Hopefully, the lectures can be held on DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make online lectures instead or to arrange an extra lecture. If you sign up for the lecture(s), you will get more information later. If you need to use an SEM before the lectures, please write to SEM@nanolab.dtu.dk.
	SEM users in building 314 and 375	Practical part Depending on what samples you have and how these should be characterized, i.e. what SEM techniques and detectors you have to use, you will get one or more individual trainings to each SEM that you are going to use, before your will be authorized to use the SEM(s) yourself.
	SEM users in building 346	Practical part Users will first have to attend a two hour SEM training session in groups of 2-3 persons. For this training the SEM Supra 1 will be used, and some different training samples will be analyzed. After the group training session, users should have one or more individual training to the SEM Supra 1, before they will be authorized to use the SEM alone. Users should bring their own sample for the training(s). After at least four hours of independent SEM Supra 1 usage, users can request additional trainings for the SEMs in the cleanroom. A 2-hour training session, max. 3 persons per session will be planed after the lecture A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
Location	All participants	Theoretical part The location of the lecture will be notified on the Doddle or after you have signed up
	SEM users in building 314 and 375	Practical part Building 314 or 375, depending on where you are going to SEM
	SEM users in building 346	Practical part The SEM Supra 1 is used a training instrument. This SEM is located in building 346 room 904 (basement). The meeting point will be at the SEM Supra 1
Qualified Prerequisites	All participants	None
Preparations	All participants	All participants: Before the lecture Read the "Scanning Electron Microscopy Primer" by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Nanolab (mainly the SEMs in building 346). You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here. All participant will also get an email with the preparation material a couple of days before the lecture. SEM users in using building 314 and 375 No other preparations
	SEM users in building 314 and 375	No other preparations
	SEM users in building 346	Before the first group training session Watch the training videos. You can find them on YouTube: https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj Before the one-on-one hands-on training Read the user manual for SEM Supra. This can be found in LabManager here
Course pesponsible	All participants	The SEM responsible persons in building 314, 346 and 375. Contact email: SEM@nanolab.dtu.dk.
	SEM users in building 314 and 375	xxx
	SEM users in building 346	xxx
Learning Objectives	All participants	Explain SEM electron optics and detectors Understand possibilities and limitations Optimize SEM images Know where to go after the lecture – which tool and where
	SEM users in building 314 and 375	xxx
	SEM users in building 346	xxx

Slides from the lecture

• Lecture slide show Media:Nanolab_SEM_lecture_2020_June_LabAdviser.pptx