LabAdviser/Courses/TPT SEM

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The SEM TPT

DTU Nanolab has a number of SEMs (Scanning Electron Microscopes) for different applications. These SEMs are located in building 314, 346 and 375.

DTU Nanolab offers a Tool Package Training (TPT) course in SEM; the course includes theory on SEM, as well as training in instrument operation.

The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab.

SEM Tool Package Training
Schedule

Theoretical part

  • A 3-hour lecture.

Sign up for here: https://danchip.doodle.com/poll/udmcihbbgudyynfy.

The next lecture(s) will be held on the 10th of August and/or on the 20th of August. Please sign up for both lectures, if you are available both days.

Hopefully, the lectures can be held on DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make online lectures instead or to arrange an extra lecture. If you sign up for the lecture(s), you will get more information later.

If you need to use an SEM before the lectures, please write to SEM@nanolab.dtu.dk.

Practical part

  • A 2-hour training session, max. 3 persons per session will be planed after the lecture
  • A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
Location

Theoretical part

  • SEM users in building 314, 346 and 375: The location of the lecture will be notified on the Doddle or after you have signed up

Practical part

  • SEM users in building 314 and 375: The training session takes place building 314 or 375.
  • SEM users in building 346: The SEM Supra 1 is used a training instrument. This SEM is located in building 346 room 904 (basement). The meeting point will be at the SEM Supra 1
Qualified Prerequisites
  • None
Preparations

All participants:

Before the lecture

  • Read "Scanning Electron Microscopy Primer" by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Nanolab. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here

SEM users in using building 314 and 375

  • No other preparations

SEM users in using building 346

Before the first group training session

Before the one-on-one hands-on training

  • Read the user manual for SEM Supra. This can be found in LabManager here
Course Responsible

The SEM responsible persons in building 314, 346 and 375. Contact email: SEM@nanolab.dtu.dk.

Learning Objectives
  • Explain SEM electron optics and detectors
  • Understand possibilities and limitations
  • Optimize SEM images
  • Know where to go after the lecture – which tool and where


Slides from the lecture




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