LabAdviser/Courses/TPT SEM

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The SEM TPT

DTU Nanolab offers a Tool Package Training in Scanning electron microscope (SEM); the course includes theory on SEM, as well as training in instrument operation.

The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab.

SEM Tool Package Training
Schedule

Theoretical part

  • A 3-hour lecture.

Sign up for here: https://danchip.doodle.com/poll/udmcihbbgudyynfy.

The next lecture(s) will be held on the 10th of August and/or on the 20th of August. Please sign up for both lectures, if you are available both days.

Hopefully, the lectures can be held on DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make online lectures instead or to arrange an extra lecture. If you sign up for the lecture(s), you will get more information later.

If you need to use an SEM before the lectures, please write to SEM@nanolab.dtu.dk.

Practical part

  • A 2-hour training session, max. 3 persons per session will be planed after the lecture
  • A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
Location

Theoretical part

  • The location of the lecture will be notified after you have signed up

Practical part

  • The training session takes place building 346 room 907(basement). The meeting point will be at the SEM Supra 1
Qualified Prerequisites
Preparations

Before the lecture

  • Read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Nanolab. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here

Before the first group training session

Before the one-on-one hands-on

Course Responsible

The SEM Group at DTU Nanolab (SEM@nanolab.dtu.dk).

Sign up for the course by e-mailing to sem@nanolab.dtu.dk.

Learning Objectives
  • Prepare samples and safely operate SEM
  • Understand possibilities and limitations of SEM
  • Explain SEM electron optics and detectors
  • Optimize and analyse SEM images


Slides from the lecture