Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2

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This system is a research tool and not available to the users

If you want to get access to the tool, then take to professor Henry Jansen

• [[/Nanoscale silicon etching with SF₆ and O₂|Nanoscale silicon etching with SF₆ and O₂ ]]
• Black silicon on Demand
• Etch silicon nanostructures
• Etch high aspect ratio silicon microstructures
• Etch 3 dimensional silicon microstructures
• Etch black silicon
• Using OES to monitor etch process