Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2
Feedback to this page: click here
===This system is a research tool and not available to the users If you want to get access to the tool, then take to professor Henry Jansen===
- [[Specific Process Knowledge/Etch/DRIE-Pegasus/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2]]
- Black silicon on Demand