LabAdviser/314/Microscopy 314-307/Technique/X-ray spectroscopy/EDS-SEM
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(content by Berit Wenzell, April 2020)
EDS-SEM Quick Guide
- 1) Link the working distance (WD) and bring Z-height to 10mm WD
- 2) Launch Aztec and save the file on the shared drive
- 3) Insert EDS detector
- 4) Select high-voltage (HV)
- Select an accelerating voltage that is 2-3x higher than the energy characteristic X-ray you want to generate from the element with the highest atomic number (Z)
- Could be 15kV for silicates…, 20kV for metal
- 5) Select operating mode
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- Point & ID: acquire image, select a point or area of interest for analysis
- Mapping: elemental distribution in region of interest
- Optimization: calibrate if needed – see below if needed.
- 6) Select process time
-
- High number – good energy resolution
- Low number – good counting statistic
- Could be 5 for Point & ID 2 for Mapping
- 7) Bring the dead time to 30 – 50 %
- Change the dead time by changing the beam current (spot or aperture)
- The beam current cannot be higher than what the sample allows, to avoid charging and beam damage. To avoid beam induced effects, accept a low dead time and count for a longer time.
- If the dead time is 100% turn off the CCD.
- 8) Aztec software
- Use the software to acquire data and process data.
- Fill out the settings from left to right. Acquire image, spectrum. Process the data.
- 9) After use, retract the detector