Specific Process Knowledge/Characterization/Optical microscope

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Zeiss Jenatech (strain) Nikon SMZ 1500 Leica S8 APO Leitz Medilux Zeiss Axiotron 2 Zeiss Jenatech (particles measurements) Noco IR microscope Nikon SMZ 1000 Nikon ME 600 Nikon Eclipse L200 Nikon Eclipse L200 (2) Nikon ECLIPSE L200N 3 Nikon ECLIPSE L200N 4
Location Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager Check LabManager
Special features Wollastron prism Stereoscopic microscope Stereoscopic microscope No No No Infra red (IR) camera Stereoscopic microscope Wollastron prism Motorized stage

auto scan guide

No No No
Ocular magnification 10x No No 10x 10x 10x 10x No 10x 10x 10x 10x 10x
Objective magnification 2.5x, 5x, 10x, 20x, 50x Zoom 100x Zoom 80x 2.5x, 5x, 10x, 20x, 50x 5x, 10x, 20x, 50x 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 20x, 50x Zoom 100x 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x 2.5x, 5x, 10x, 20x, 50x, 100x
Bright field Yes No No Yes Yes Yes Yes No Yes Yes Yes Yes Yes
Dark field Yes No No No Yes Yes No No Yes Yes Yes Yes Yes
Polarizer Yes No No No No Yes No No Yes No No No No
Episcopic light (reflected light) Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes
Diascopic light (transmitted light) No Yes No Yes Yes No Yes No No Yes Yes Yes Yes
View with eye Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes Yes
View on screen (camera) Yes No No Yes Yes No Yes (IR) No Yes Yes Yes Yes Yes
Measurement option No No No No Yes No No No No Yes Yes Yes Yes


It is possible to make an automated scanning of a full wafer on the Nikon Eclipse L200 with motorized stage Nikon Eclipse L200 auto scan guide

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Microscope Location Responsible Group Objectives Ocular Special features Features Camera Analysis software
Nikon SMZ 1000
 346-901 Wet chemistry Zoom 0.8x - 8x 10x Stereoscopic microscope Episcopic No No
Noco IR
 346-901 Wet chemistry
  • 2.5x
  • 10x
  • 20x
  • 50x
 10x IR imaging
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
 IR camera No
Leica INM100
 346-901 Wet chemistry
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
 DS-Fi2 NIS-D
Nikon Eclipse L200 #2
 C1 Thin Film
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
 DS-Fi1 NIS-D
Zeiss Jenatech
 C1 Thin Film
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
 No No
Nikon Eclipse L200 #1
 D3 Thin Film
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
 DS-Fi1 NIS-BR
Leitz Medilux
 D3 Thin Film
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
 DX40-274FW Kappa Control Center
Nikon Eclipse L200N #3
 E4 Lithography
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • DS-Fi2
  • C-mount, 0.7x relay
 NIS-D
Nikon Eclipse L200N #4
 E5 Lithography
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • DS-Fi2
  • C-mount, 0.7x relay
 NIS-D
Nikon ME 600
 F1 Thin Film
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 10x
  • Polarizer
  • Episcopic
  • Brightfield
  • Darkfield
 DS-Fi2 NIS-D
Leica S8 APO
 F2 Thin Film Zoom 1x - 8x 10x Stereoscopic microscope Episcopic No No
Zeiss Axiotron
 F3 Lithography
  • 5x
  • 10x
  • 20x
  • 50x
 10x
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
 Infinity X DeltaPix


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Nikon SMZ 1000 Noco IR Leica INM 100 Nikon Eclipse L200 #2 Zeiss Jenatech Nikon Eclipse L200 #1 Leitz Medilux Nikon Eclipse L200N #3 Nikon Eclipse L200N #4 Nikon ME 600 Leica S8 APO Zeiss Axiotron
Location 346-901 346-901 346-901 C1 C1 D3 D3 E4 E5 F1 F2 F3
Responsible group Wet chemistry Wet chemistry Wet chemistry Thin Film Thin Film Thin Film Thin Film Lithography Lithography Thin Film Thin Film Lithography
Objectives Zoom 0.8x - 8x
  • 2.5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 2.5x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
  • 5x
  • 10x
  • 20x
  • 50x
  • 100x
 Zoom 1x - 8x
  • 5x
  • 10x
  • 20x
  • 50x
Ocular 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x 10x
Special features Stereoscopic microscope IR imaging Stereoscopic microscope
Features
  • Episcopic
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • Episcopic
  • Diascopic
  • Brightfield
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • Polarizer
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
  • Polarizer
  • Episcopic
  • Brightfield
  • Darkfield
  • Episcopic
  • Episcopic
  • Diascopic
  • Brightfield
  • Darkfield
Camera None IR camera DS-Fi2 DS-Fi1 None DS-Fi1 DX40-274FW
  • DS-Fi2
  • C-mount, 0.7x relay
  • DS-Fi2
  • C-mount, 0.7x relay
 DS-Fi2 None Infinity X
Analysis software None None NIS-D NIS-D None NIS-BR Kappa Control Center NIS-D NIS-D NIS-D None DeltaPix


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