Specific Process Knowledge/Thermal Process/Furnace Noble

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Noble furnace

The Noble Furnace is used for annealing and oxidation of different samples. Annealing can be done in a nitrogen or argon atmosphere. A bubbler has also been installed in the furnace, so it is possible to do both wet and dry oxidations. The maximum temperature of the furnace is 1000 ^oC.

In the Noble Furnaces more dirty samples with metals and some specific polymers are allowed. Different sample holder are available for wafers and smaller samples (placed on a Si carrier wafer).

The furnace is located in service area Cx1.

Please check the cross contamination information in LabManager before you use the furnace.

Noble furnace. Positioned in service area Cx1

The user manual, technical information and contact information can be found in LabManager:

Noble furnace

Overview of the performance of the Noble Furnace

Purpose	Oxidation Annealing	Oxidation: Dry Wet (with bubbler. Water steam + N2) Annealing: N2 Ar
Process parameter range	Process Temperature	Up to 1000 oC
	Process pressure	1 atm
	Gasses on the system	N2: 0-5 SLM O2: 0-5 SLM Ar: 0-7 SLM
Substrates	Batch size	1-25 100 mm wafers (or 50 mm wafers) per run A number of smaller samples (placed on a Si carrier wafer)
	Substrate material allowed	Silicon samples Silicon samples with metals Silicon sample with polymers (only approved materials)