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Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

The Cleanroom Introduction Course

For information regarding the Introduction Course, please take a look at the DTU Danchip homepage, a direct link is given here: [1]

The Lithography TPT

DTU Danchip offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom.

The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.

Lithography Tool Package Training
Schedule	Theoretical part Lecture videos that can be viewed at one's leisure. A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30). Sign up via Q&E session Doodle Practical part A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30). Sign up via Training session Doodle
Location	Theoretical part The location of the "questions and exercises" session is room 121A in building 345C. Practical part The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
Qualified Prerequisites	Cleanroom safety course at DTU Danchip Admission to the cleanroom must be obtained before the training session Theoretical part must be completed before the training session.
Preparations	Before the "questions and exercises" session Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography (Available online from DTU campus). Watch the lecture videos (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos. Before training session Complete the theoretical part (Q&E) Watch the training videos of spin coating (automatic), exposure (operation + alignment), and development (automatic). Study the equipment manuals. The manuals are available in LabManager. Study the TPT process flows (first print + alignment). Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.
Course Responsible	The Lithography Group at DTU Danchip lithography@danchip.dtu.dk. Sign up for the course using Doodle (links under schedule).
Learning Objectives	Describe fundamental parts of lithographic processing in a cleanroom, design of process flows Authorization to use spin coater, mask aligner, and developer at DTU Danchip Calculate relevant process parameters Analyze and apply your results of lithographic processing

Material for preparations and further information

Literature

Lecture videos
7 videos, 2:41 hours in total

Lecture slides

Training videos
On YouTube:

On DTU Podcasts:

Manuals

Automatic Spin Coater: Spin Coater: Gamma UV
UV Mask Aligner: Aligner: MA6 - 2 or KS Aligner
Automatic Puddle Developer: Developer: TMAH UV-lithography

Process Flows

The Mask Design TPT

DTU Danchip offers a Tool Package Training in Mask Design. The course is for all users who intend to design their own masks for lithography.

For instructions please download the exercise for the design program you want to learn:

Mask Design Training
Schedule	Self-study using screen cast videoes demonstrating the use of either CleWin og L-edit. An exercise where you are guided through the design of a mask. All materials are provided below. An optional ½ hour Q&A session with an expert on mask layout. You can make an appointment after finishing the exercise.
Location	Anywhere you like. DTU network access required.
Qualified Prerequisites	Basic knowledge about micro-lithography Access to a computer where you can install Clewin or L-edit Danchip provide free access to use Clewin 5 through a network license. If you want to use L-edit you will need a valid license of your own Basic knowledge about micro-fabrication techniques
Preparations	None
Course Responsible	Customer support at DTU Danchip. If you have questions you can contact us by e-mailing danchipsupport@danchip.dtu.dk.
Learning Objectives	Get acquainted with either Clewin 5 or L-edit mask design programs construct and manipulate basic shapes (rectangles, polygons, circles etc.) use mask layers and hierarchical mask design choose mask polarity and orientation for different resist types and Front/Back-side alignment select and design appropriate test structures and alignment marks for a process make a chip/wafer layout usable for dicing export the layout to cif or gds files with appropriate layer names make a mask order

Material for the Mask Design course

Literature

How to install CleWin

Training videos

Exercises

Exercise for Clewin 5
Mask layout file for Clewin Exercise (Right click and Use "save link as...")
Exercise for L-Edit

The Dry Etch TPT

DTU Nanolab offers a Tool Package Training in dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.

The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.

Dry Etch Tool Package Training
Schedule	Theoretical part A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you must attend a Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: Dry Etch TPT Lecture doodle. The Question&Evaluation session takes place in room: 347-078 Practical part A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session.
Location	Theoretical part (the question&evaluation session) Room: 347-R078 Practical part The training session takes place inside the cleanroom. The meeting point will be in The gowning area.
Qualified Prerequisites	Cleanroom safety course at DTU Nanolab Admission to the cleanroom must be obtained before the training session
Preparations	Before the Question&Evaluation session Watch the lecture videos, see link to the videos below. If you are not familiar with dry etching we advice you to read through the "Lecture slides with explanatory text included" File:TPT Dry etching April2018 with notes.pdf before watching the videos. Before training session Watch the training video: TPT hands-on intro Watch the screen cast video's for the ASE/AOE software Watch the screen cast video's for the DRIE/ICP metal and III-V ICP These are on YouTube and you can find a link to the videos below
Course Responsible	The Dry Etch Group at DTU Nanolab Jonas Michael-Lindhard Berit Herstrøm If you have questions you can contact us by e-mailing dryetch@danchip.dtu.dk.
Learning Objectives	Know why and when to use dry etching Use the dry etchers without harming the machines Select the right instrument to use for his/her dry etch processing Select an appropriate etch recipe for his/her dry etch processing Spot when the recipe needs to be tuned for his/her needs and Suggest relevant tuning parameters

Material for preparations and further information

Literature

No extra Literature at the moment

Slides from Lecture

Lecture powerpoint slide show File:TPT Dry etching April2018.pptx
Lecture slides with explanatory text included File:TPT Dry etching April2018 with notes.pdf

Lecture videos
(Watch before the question and evaluation session)

The 9 lecture videos can be found on YouTube here: Lecture videos

Pre hands-on training videos
(Watch before the hands-on training)

The 13 pre hands-on training vidoes can be found on You Tube here:Pre hands-on training videos

The SEM TPT

DTU Nanolab offers a Tool Package Training in Scanning electron microscope (SEM); the course includes theory on SEM, as well as training in instrument operation.

The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.

SEM Tool Package Training
Schedule	Theoretical part A 3-hour lecture. The next lectures will be held Monday the 9th of September 2019 from 9:00 to 12:00. Sign up here: https://danchip.doodle.com/poll/udmcihbbgudyynfy. Practical part A 2-hour training session, max. 3 persons per session will be planed after the lecture A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
Location	Theoretical part The location of the lecture will be notified after you have signed up Practical part The training session takes place building 346 room 907(basement). The meeting point will be at the SEM Supra 1
Qualified Prerequisites
Preparations	Before the lecture Read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here Before the first group training session Watch the training videos: You can find them on YouTube: https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj Before the one-on-one hands-on Look at the presentation Media:Operating_SEM_Supra_1_final.pptx Read the user manual for SEM Supra 1 Click here
Course Responsible	The SEM Group at DTU Danchip (SEM@danchip.dtu.dk). Sign up for the course by e-mailing to sem@danchip.dtu.dk.
Learning Objectives	Prepare samples and safely operate SEM Understand possibilities and limitations of SEM Explain SEM electron optics and detectors Optimize and analyse SEM images

Slides from the lecture

Lecture slide show Media:Danchip_SEM_lecture_January2019_LabAdviser.pptx

Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.

Thin film tool package training (TPT)
Schedule	Theoretical part 1^st lecture (2 hours): An introduction to thin films Material properties Overview of different thin film techniques at DTU Nanolab – 1^st part: Thermal oxidation Electroplating Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e 2^nd lecture (3 hours): Vacuum basics Overview of different thin film techniques at DTU Nanolab – 2^nd part: PVD (physical vapour deposition) E-beam evaporation Thermal evaporation Sputtering CVD (chemical vapour depostion) LPCVD (low pressure chemical vapour deposition) PECVD (plasma enhanced chemical vapour deposition) ALD (atomic layer deposition) Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf Practical part None
Location	Theoretical part The location of the lectures will be notified in the doodles
Qualified prerequisites	None
Preparations	None
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand importance of correct process pressure (for vacuum processes) Understand different thin film techniques Compare and be able to select appropriate thin film technique

Slides from the lectures

Slides from lecture 1

Lecture slide show Media:1_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx

Slides from lecture 2

Lecture slide show Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx

PhD course (10868)

DTU Nanolab offers a PhD course: | 10868 Methods in micro and nano fabrication

This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom.

The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab.

The TPT courses presented above is a main part of the course.

The course gives you 5 ECTS points