Specific Process Knowledge/Characterization/Optical characterization/advanced ellipsometry

Examples of advanced use of the ellipsometer

Dielectric function measurement of emerging semiconductors by Andrea Crovetto@Nanotech 2016

Media:2016_11_ancro_ellipsometry_at_Danchip.pdf
Content:

• Dielectric function determination of new thin-film semiconductors
  • Learning about their electronic properties
• Phase analysis of ”non-ideal” thin films
• Thickness mapping (for its own sake and for resistivity mapping)
• All-optical determination of electrical properties of transparent conductive materials