Feedback to this page: click here

AFM Icon 1 accessories and acceptance test

Accessories following the system

Extra chuck

We have two chucks:

A symmetric chuck that handles up to 210mm wafers and 15mm thick

An asymmetric chuck that handles up to ~4" wafer (but not small pieces) - using this a whole 4" can be accessed without rotating the sample.

Holders

Magnetic sample holder + magnetic discs + double sided tape
Holder for vertical profile scans

Modes included

ScanAsyst
TappingMode (air)
Contact Mode
Lateral Force Microscopy
PhaseImaging
Lift mode
MFM
Force Spectroscopy
Force volume
EFM
surface potential
Torsional Resonance Mode
Piezoresponse Microscopy
Force spectroscopy

Extra modes:

PeakForce KPFM package (incl extra box for high voltage PF KPFM)
PFQNM package
Microscope Image Registration and Overlay (MIRO) software this is only working in the old software (before version 9.4)

Probes

Probes that followed the system (we may not have them anymore!)

	ScanAsyst mode	Tapping mode	Contact mode	PF-KPFM
Generel description	Generel description	Generel description
Probes that followed the system	ScanAsyst air 30ps ScanAsyst fluid 10ps ScanAsyst fluid + 10ps	MPP-11100-10 MPP-21100-10 MPP-11120-10 RTESPA TESPA-V2 10ps OTESPA-R3 10ps High Aspect ratio probes 1:15: FIB6-400A 5ps MPP-12120 10ps. Tap150A MPP-13120-10 TAP525A	SNL-10 20ps	SCM-PIT 10ps PFQNE-Al 10ps

Samples

QC grid: VGRP-15M 10µm pitch and depth reference 178nm
PF KPFM-SMPL Kelvin probe Sample: Al + Au on Si

Calibration samples for getting quantitative modulus measurements:

PDMS-soft-1-12M: PDMS gel 2.5MPa
PDMS-soft-2-12M: PDMS gel 3.5MPa
PSFilm-12M: Polystyrene filem
FSilica-12M: Fused Silica
Sapphire-12M: Sapphire
RS-12M: Ti roughness sample
HOPG-12M: Highly Orientated Pyrolytic Graphite
PS-LDPE: Harmonix training

HOPG: Highly Oriented Pyrolytic Graphite

Acceptance tests done

Noise tests

Sensor noise

Tappingmode, OTESPA-R3 probe used.
First we made a false engage (scanning in air): Turn off gain 0 0
Z range 0.2my
Scan size 0.01nm
We saw some 50Hz noise (electrical - or maybe pumps): Rq 15 pm (specs 35pm)

System noise

Noise on sample: scan size 0.1nm
we started with 1my scan size to optimize the scan.
2.43Hz
256 lines
Z range at 2my to get sub nanometer resolution in Z
Rq: 54,5pm (plade vibrator koerte udenfor)
Rq: 23pm uden vibrator koerende + ro og med aaben hood.
Rq:71pm uden vibrator koerende + ro og med lukket hood

Roughness

HAR: 200nm wide 400nm deep

HAR: 2µm wide 6µm deep

Graphene KPFM measurement

Height image: The graphene and structuring in graphene is not visible
Potential image: Potential difference between grapheme and non-graphene is visible
Phase: Phase imaging maps the phase lag between the periodic signal driving the cantilever and the oscillations of the cantilever. Changes in phase lag often indicate changes in the properties of the sample surface. Here the structuring in the graphene is very clear

AFM Icon 2 accessories and acceptance test