Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces

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What scanning mode, experiment/workspace and probe should I select

Roughness measurements Topographic measurements with no steep/abrupt steps Steep/abrupt steps but no high aspect ratio High aspect ratio measurements
Recommended mode Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend ScanAsyst mode because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. For Topographic measurements with no steep/abrupt steps we also recommend ScanAsyst mode due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. For Steep/abrupt steps but no high aspect ratio structures we still recommend ScanAsyst mode due to ease of use but it will scan slower than Tapping mode. For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefore we recommend Tapping mode.
Recommended probes ScanAsyst in air ScanAsyst in air ScanAsyst in air for ScanAsyst mode

TAP300Al-G for Tapping mode

AR5T-NCHR

FIB6-400A

Recommended experiment/Workspace

ScanAsyst in air - roughness (<10nm)

ScanAsyst in air

ScanAsyst in air - steps TappingMode 300nm trench (for steps <~1µm)

Tappping mode in air - 6µm Deep Trench (for steps >1~µm)

  • By choosing the work space QNM in air (Mechanical properties - ?? - QNM in air) ScanAsyst is included and so are the nanomechanical properties like modulus, adhesion, dissipation and deformation



More information about de different modes

Contact, Tapping and Peak Force Tapping

Please flowing this link to Brukers homepage: Introduction_to_Brukers_ScanAsyst_and_PeakForce_Tapping_Atomic_Force_Microscopy_Technology_AFM_AN133.pdf

PeakForce tapping and quantitative nanomechanical mapping

Please flowing this link to Brukers homepage: PeakForce tapping and Nanomechanical option

Peak Force KPFM (Kelvin Probe Force Microscopy)

Please flowing this link to Brukers homepage: pf-kpfm.html