Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces
Feedback to this page: click here
What scanning mode, experiment/workspace and probe should I select
| Roughness measurements | Topographic measurements with no steep/abrupt steps | Steep/abrupt steps but no high aspect ratio | High aspect ratio measurements | |
|---|---|---|---|---|
| Recommended mode | Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend ScanAsyst mode because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | For Topographic measurements with no steep/abrupt steps we also recommend ScanAsyst mode due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | For Steep/abrupt steps but no high aspect ratio structures we still recommend ScanAsyst mode due to ease of use but it will scan slower than Tapping mode. | For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend Tapping mode. |
| Recommended probes | ScanAsyst in air | ScanAsyst in air | ScanAsyst in air for ScanAsyst mode
TAP300Al-G for Tapping mode |
AR5T-NCHR |
| Recommended experiment/Workspace |
ScanAsyst in air - roughness (<10nm) |
ScanAsyst in air |
ScanAsyst in air - steps | TappingMode 300nm trench (for steps <~1µm)
Tappping mode in air - 6µm Deep Trench (for steps >1~µm) |