Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance
Accessories following the system
Extra chuck
We have two chucks:
- A symmetric chuck that handles up to 210mm wafers and 15mm thick
- An asymmetric chuck that handles up to ~4" wafer (but not small pieces) - using this a whole 4" can be accessed without rotating the sample.
Holders
- Magnetic sample holder + magnetic discs + double sided tape
- Holder for vertical profile scans
Modes included
- ScanAsyst
- TappingMode (air)
- Contact Mode
- Lateral Force Microscopy
- PhaseImaging
- Lift mode
- MFM
- Force Spectroscopy
- Force volume
- EFM
- surface potential
- Torsional Resonance Mode
- Piezoresponse Microscopy
- Force spectroscopy
Extra modes:
- PeakForce KPFM package (incl extra box for high voltage PF KPFM)
- PFQNM package
- Microscope Image Registration and Overlay (MIRO) software
Probes
Probes that followed the system (we may not have them anymore!)
For PF KPFM:
- SCM-PIT 10ps
- PFQNE-Al 10ps
Contact mode:
- SNL-10 20ps
Tapping mode:
- MPP-11100-10
- MPP-21100-10
- MPP-11120-10 RTESPA
- TESPA-V2 10ps
- OTESPA-R3 10ps
- High Aspect ratio probes 1:15: FIB6-400A 5ps
ScanAsyst:
- ScanAsyst air 30ps
- ScanAsyst fluid 10ps
- ScanAsyst fluid + 10ps
PeakForce QNM:
- MPP-12120 10ps. Tap150A
- MPP-13120-10 TAP525A
Samples:
- QC grid: VGRP-15M 10µm pitch and depth reference 178nm
- PF KPFM-SMPL Kelvin probe Sample: Al + Au on Si
Calibration samples for getting quantitative modulus measurements:
- PDMS-soft-1-12M: PDMS gel 2.5MPa
- PDMS-soft-2-12M: PDMS gel 3.5MPa
- PSFilm-12M: Polystyrene filem
- FSilica-12M: Fused Silica
- Sapphire-12M: Sapphire
- RS-12M: Ti roughness sample
- HOPG-12M: Highly Orientated Pyrolytic Graphite
- PS-LDPE: Harmonix training
- HOPG: Highly Oriented Pyrolytic Graphite